公开(公告)号：US11819890B2

公开(公告)日：2023-11-21

申请号：US16468008

申请日：2017-12-08

申请人： Hitachi High-Technologies Corporation

发明人： Takushi Miyakawa ,  Gorou Yoshida ,  Yuto Tanaka ,  Kohei Nonaka ,  Takamichi Mori ,  Tetsuji Kawahara

IPC分类号： B08B9/032 ,  G01N35/10

CPC分类号： B08B9/0326 ,  B08B9/0325 ,  G01N35/10 ,  G01N35/1004 ,  B08B2209/005

摘要： A nozzle cleaner includes: a cleaning tank which stores a cleaning solution; a first conductive member that is disposed to be immersed into the cleaning solution stored in the cleaning tank when the nozzle is cleaned; an ultrasonic wave generating mechanism which is disposed so that at least a part of a second conductive member is immersed into the cleaning solution stored in the cleaning tank when the nozzle is cleaned and generates an ultrasonic vibration in the cleaning solution stored in the cleaning tank; a first voltage control unit which controls a potential applied to the first conductive member; and a second voltage control unit which controls a potential applied to the second conductive member, wherein the first voltage control unit applies a second potential V2 higher than a first potential V1 applied to the nozzle when the nozzle is cleaned to the first conductive member.