公开(公告)号：US20160008849A1

公开(公告)日：2016-01-14

申请号：US14799632

申请日：2015-07-15

Applicant: Hitachi Medical Corporation

Inventor： Shuntaro MACHIDA ,  Takashi KOBAYASHI

IPC: B06B1/02

CPC classification number: B06B1/0292 ,  B81C1/00158 ,  B81C1/00182 ,  B81C1/00214 ,  B81C1/00476 ,  B81C1/00531 ,  B81C1/00611 ,  B81C2201/0104 ,  B81C2201/0107 ,  B81C2201/0109 ,  C09K13/00 ,  C23F4/00 ,  H01L21/30604 ,  H01L29/84 ,  Y10T29/49156

Abstract: Disclosed is an ultrasonic transducer that is provided with: a bottom electrode; an electric connection part which is connected to the bottom electrode from the bottom of the bottom electrode; a first insulating film which is formed so as to cover the bottom electrode; a cavity which is formed on the first insulating film so as to overlap the bottom electrode when seen from above; a second insulating film which is formed so as to cover the cavity; and a top electrode which is formed on the second insulating film so as to overlap the cavity when seen from above. The electric connection part to the bottom electrode is positioned so as to not overlap the cavity when seen from above.

Abstract translation: 公开了一种超声波换能器，其具备：底部电极; 电连接部，其从所述底部电极的底部连接到所述底部电极; 形成为覆盖底部电极的第一绝缘膜; 形成在第一绝缘膜上以便从上方观察时与底部电极重叠的空腔; 形成为覆盖空腔的第二绝缘膜; 以及形成在第二绝缘膜上以从上方观察时与空腔重叠的顶部电极。 位于底部电极的电连接部分被定位为当从上方观察时不与腔体重叠。