公开(公告)号：US08404431B1

公开(公告)日：2013-03-26

申请号：US13289369

申请日：2011-11-04

申请人： Hitoshi Hatate ,  Hisayoshi Watanabe ,  Masachika Hashino ,  Koichi Otani

发明人： Hitoshi Hatate ,  Hisayoshi Watanabe ,  Masachika Hashino ,  Koichi Otani

IPC分类号： G02B5/127

CPC分类号： G11B5/3169 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3166 ,  Y10T29/49048

摘要： A method for manufacturing a thin-film magnetic head includes processes of forming a polishing position sensor and a recording head portion alongside on one side of a wafer. The process of forming the recording head portion has a step of performing a photolithography process after applying an alkali soluble resin film and a photoresist film in the named order. The process of forming the polishing position sensor has a step of performing a photolithography process on the photoresist film while having only the photoresist film out of the alkali soluble resin film and the photoresist film.

摘要翻译： 一种制造薄膜磁头的方法包括在晶片的一侧旁边形成研磨位置传感器和记录头部的工序。 形成记录头部分的过程具有按照所述顺序施加碱溶性树脂膜和光致抗蚀剂膜之后进行光刻工艺的步骤。 形成抛光位置传感器的过程具有在光致抗蚀剂膜上进行光刻工艺的步骤，同时在碱溶性树脂膜和光致抗蚀剂膜中仅具有光致抗蚀剂膜。

公开(公告)号：US20110127234A1

公开(公告)日：2011-06-02

申请号：US12591745

申请日：2009-11-30

申请人： Hisayoshi Watanabe ,  Masachika Hashino ,  Michitoshi Tsuchiya ,  Koichi Otani ,  Tatsuhiro Nojima ,  Tsutomu Nishinaga ,  Hideyuki Ukita

发明人： Hisayoshi Watanabe ,  Masachika Hashino ,  Michitoshi Tsuchiya ,  Koichi Otani ,  Tatsuhiro Nojima ,  Tsutomu Nishinaga ,  Hideyuki Ukita

IPC分类号： G11B5/127

CPC分类号： G11B5/115 ,  G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A manufacturing method for a magnetic head includes the steps of; forming a structure on a lower shield, the structure including a lower gap, a main magnetic pole and first and second side gaps; forming first and second side shields; forming an upper gap; and forming an upper shield. In the step of forming the structure, an initial lower gap layer is formed on the lower shield, the initial lower gap layer including a pre-lower-gap portion, and two to-be-removed portions that are located on opposite sides of the pre-lower-gap portion. Then, a protrusion including the main magnetic pole and the first and second side gaps is formed on the pre-lower-gap portion. With the top surface of the protrusion covered with a mask, the initial lower gap layer is etched in part to thereby form the lower gap.

摘要翻译： 一种用于磁头的制造方法包括以下步骤： 在下屏蔽上形成结构，该结构包括下间隙，主磁极和第一和第二侧隙; 形成第一和第二侧面罩; 形成上部间隙; 并形成上护罩。 在形成该结构的步骤中，在下屏蔽件上形成初始下间隙层，初始下间隙层包括预先下间隙部分，以及两个待除去部分，其位于 前下间隙部分。 然后，在前下间隙部分上形成包括主磁极和第一和第二侧间隙的突起。 在凸起的顶表面被掩模覆盖的情况下，初始的下间隙层被部分蚀刻，从而形成下间隙。

公开(公告)号：US08323517B2

公开(公告)日：2012-12-04

申请号：US12753557

申请日：2010-04-02

申请人： Hisayoshi Watanabe ,  Hideyuki Yatsu ,  Masachika Hashino ,  Koichi Otani

发明人： Hisayoshi Watanabe ,  Hideyuki Yatsu ,  Masachika Hashino ,  Koichi Otani

IPC分类号： B29D11/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.

摘要翻译： 形成垂直磁记录型薄膜磁头的磁极部分的方法和制造垂直磁记录型薄膜磁头的方法，该方法包括在下层上形成具有开口的抗蚀剂图案，形成 第一非磁性层，形成形成磁性层图案的第一磁性层，去除抗蚀剂图案，然后在第一非磁性层和磁性层图案上施加抗蚀剂层，在所施加的抗蚀剂层的中途显影或灰化，并烘烤剩余的抗蚀剂层 通过对所述烘烤抗蚀剂层进行蚀刻从所述磁性层图案的至少一个侧表面去除所述第一非磁性层，除去所有所述抗蚀剂层，然后在至少所述磁性层图案上形成第二非磁性层，以及形成 在形成的第二非磁性层上的第二磁性层。

公开(公告)号：US08117737B2

公开(公告)日：2012-02-21

申请号：US12591745

申请日：2009-11-30

申请人： Hisayoshi Watanabe ,  Masachika Hashino ,  Michitoshi Tsuchiya ,  Koichi Otani ,  Tatsuhiro Nojima ,  Tsutomu Nishinaga ,  Hideyuki Ukita

发明人： Hisayoshi Watanabe ,  Masachika Hashino ,  Michitoshi Tsuchiya ,  Koichi Otani ,  Tatsuhiro Nojima ,  Tsutomu Nishinaga ,  Hideyuki Ukita

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/115 ,  G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A manufacturing method for a magnetic head includes the steps of: forming a structure on a lower shield, the structure including a lower gap, a main magnetic pole and first and second side gaps; forming first and second side shields; forming an upper gap; and forming an upper shield. In the step of forming the structure, an initial lower gap layer is formed on the lower shield, the initial lower gap layer including a pre-lower-gap portion, and two to-be-removed portions that are located on opposite sides of the pre-lower-gap portion. Then, a protrusion including the main magnetic pole and the first and second side gaps is formed on the pre-lower-gap portion. With the top surface of the protrusion covered with a mask, the initial lower gap layer is etched in part to thereby form the lower gap.

摘要翻译： 一种用于磁头的制造方法包括以下步骤：在下屏蔽上形成结构，该结构包括下间隙，主磁极以及第一和第二侧间隙; 形成第一和第二侧面罩; 形成上部间隙; 并形成上护罩。 在形成该结构的步骤中，在下屏蔽件上形成初始下间隙层，初始下间隙层包括预先下间隙部分，以及两个待除去部分，其位于 前下间隙部分。 然后，在前下间隙部分上形成包括主磁极和第一和第二侧间隙的突起。 在凸起的顶表面被掩模覆盖的情况下，初始的下间隙层被部分蚀刻，从而形成下间隙。

公开(公告)号：US08282843B2

公开(公告)日：2012-10-09

申请号：US12591130

申请日：2009-11-10

申请人： Tatsuhiro Nojima ,  Hisayoshi Watanabe ,  Masachika Hashino

发明人： Tatsuhiro Nojima ,  Hisayoshi Watanabe ,  Masachika Hashino

IPC分类号： B44C1/22

CPC分类号： G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49044

摘要： A method of manufacturing a perpendicular magnetic head having a writing element that writes magnetic information to a recording medium includes forming a main magnetic pole part generating a magnetic field on a substrate; removing at least a part of the substrate and a material existing at a circumference of the main magnetic pole part to expose an entire circumference of the main magnetic pole part at a surface that becomes an opposing medium surface (ABS) opposite to the recording medium; forming a shield gap film that is made of a nonmagnetic material so as to cover the entire circumference of the main magnetic pole part at least at the surface that becomes the ABS; and forming a shield layer so as to cover an entire circumference of the shield gap film at least at the surface that becomes the ABS.

摘要翻译： 具有将磁信息写入记录介质的写入元件的垂直磁头的制造方法包括在基板上形成产生磁场的主磁极部， 去除所述基板的至少一部分和存在于所述主磁极部分的圆周处的材料，以在与所述记录介质相对的相对介质表面（ABS）的表面处暴露所述主磁极部分的整个周边; 形成由非磁性材料制成的屏蔽间隙膜，以便至少在成为ABS的表面上覆盖主磁极部分的整个周边; 以及形成屏蔽层，以便至少在成为ABS的表面处覆盖屏蔽间隙膜的整个周边。

公开(公告)号：US20110108520A1

公开(公告)日：2011-05-12

申请号：US12591130

申请日：2009-11-10

申请人： Tatsuhiro Nojima ,  Hisayoshi Watanabe ,  Masachika Hashino

发明人： Tatsuhiro Nojima ,  Hisayoshi Watanabe ,  Masachika Hashino

IPC分类号： B44C1/22 ,  C23C14/34

CPC分类号： G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49044

摘要： A method of manufacturing a perpendicular magnetic head having a writing element that writes magnetic information to a recording medium includes forming a main magnetic pole part generating a magnetic field on a substrate; removing at least a part of the substrate and a material existing at a circumference of the main magnetic pole part to expose an entire circumference of the main magnetic pole part at a surface that becomes an opposing medium surface (ABS) opposite to the recording medium; forming a shield gap film that is made of a nonmagnetic material so as to cover the entire circumference of the main magnetic pole part at least at the surface that becomes the ABS; and forming a shield layer so as to cover an entire circumference of the shield gap film at least at the surface that becomes the ABS.

摘要翻译： 具有将磁信息写入记录介质的写入元件的垂直磁头的制造方法包括在基板上形成产生磁场的主磁极部， 去除所述基板的至少一部分和存在于所述主磁极部分的圆周处的材料，以在与所述记录介质相对的相对介质表面（ABS）的表面处暴露所述主磁极部分的整个周边; 形成由非磁性材料制成的屏蔽间隙膜，以便至少在成为ABS的表面上覆盖主磁极部分的整个周边; 以及形成屏蔽层，以便至少在成为ABS的表面处覆盖屏蔽间隙膜的整个周边。