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1.发明授权Method for manufacturing perpendicular magnetic head including a main pole surrounded by shield layers 有权用于制造包括被屏蔽层包围的主极的垂直磁头的方法公开(公告)号：US08282843B2
公开(公告)日：2012-10-09
申请号：US12591130
申请日：2009-11-10
IPC分类号： B44C1/22
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49044
摘要： A method of manufacturing a perpendicular magnetic head having a writing element that writes magnetic information to a recording medium includes forming a main magnetic pole part generating a magnetic field on a substrate; removing at least a part of the substrate and a material existing at a circumference of the main magnetic pole part to expose an entire circumference of the main magnetic pole part at a surface that becomes an opposing medium surface (ABS) opposite to the recording medium; forming a shield gap film that is made of a nonmagnetic material so as to cover the entire circumference of the main magnetic pole part at least at the surface that becomes the ABS; and forming a shield layer so as to cover an entire circumference of the shield gap film at least at the surface that becomes the ABS.
摘要翻译： 具有将磁信息写入记录介质的写入元件的垂直磁头的制造方法包括在基板上形成产生磁场的主磁极部， 去除所述基板的至少一部分和存在于所述主磁极部分的圆周处的材料，以在与所述记录介质相对的相对介质表面（ABS）的表面处暴露所述主磁极部分的整个周边; 形成由非磁性材料制成的屏蔽间隙膜，以便至少在成为ABS的表面上覆盖主磁极部分的整个周边; 以及形成屏蔽层，以便至少在成为ABS的表面处覆盖屏蔽间隙膜的整个周边。
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2.发明申请公开(公告)号：US20110127234A1
公开(公告)日：2011-06-02
申请号：US12591745
申请日：2009-11-30
申请人： Hisayoshi Watanabe , Masachika Hashino , Michitoshi Tsuchiya , Koichi Otani , Tatsuhiro Nojima , Tsutomu Nishinaga , Hideyuki Ukita
发明人： Hisayoshi Watanabe , Masachika Hashino , Michitoshi Tsuchiya , Koichi Otani , Tatsuhiro Nojima , Tsutomu Nishinaga , Hideyuki Ukita
IPC分类号： G11B5/127
CPC分类号： G11B5/115 , G11B5/1278 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A manufacturing method for a magnetic head includes the steps of; forming a structure on a lower shield, the structure including a lower gap, a main magnetic pole and first and second side gaps; forming first and second side shields; forming an upper gap; and forming an upper shield. In the step of forming the structure, an initial lower gap layer is formed on the lower shield, the initial lower gap layer including a pre-lower-gap portion, and two to-be-removed portions that are located on opposite sides of the pre-lower-gap portion. Then, a protrusion including the main magnetic pole and the first and second side gaps is formed on the pre-lower-gap portion. With the top surface of the protrusion covered with a mask, the initial lower gap layer is etched in part to thereby form the lower gap.
摘要翻译： 一种用于磁头的制造方法包括以下步骤： 在下屏蔽上形成结构，该结构包括下间隙，主磁极和第一和第二侧隙; 形成第一和第二侧面罩; 形成上部间隙; 并形成上护罩。 在形成该结构的步骤中，在下屏蔽件上形成初始下间隙层，初始下间隙层包括预先下间隙部分，以及两个待除去部分，其位于 前下间隙部分。 然后，在前下间隙部分上形成包括主磁极和第一和第二侧间隙的突起。 在凸起的顶表面被掩模覆盖的情况下，初始的下间隙层被部分蚀刻，从而形成下间隙。
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3.发明授权公开(公告)号：US08117737B2
公开(公告)日：2012-02-21
申请号：US12591745
申请日：2009-11-30
申请人： Hisayoshi Watanabe , Masachika Hashino , Michitoshi Tsuchiya , Koichi Otani , Tatsuhiro Nojima , Tsutomu Nishinaga , Hideyuki Ukita
发明人： Hisayoshi Watanabe , Masachika Hashino , Michitoshi Tsuchiya , Koichi Otani , Tatsuhiro Nojima , Tsutomu Nishinaga , Hideyuki Ukita
CPC分类号： G11B5/115 , G11B5/1278 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A manufacturing method for a magnetic head includes the steps of: forming a structure on a lower shield, the structure including a lower gap, a main magnetic pole and first and second side gaps; forming first and second side shields; forming an upper gap; and forming an upper shield. In the step of forming the structure, an initial lower gap layer is formed on the lower shield, the initial lower gap layer including a pre-lower-gap portion, and two to-be-removed portions that are located on opposite sides of the pre-lower-gap portion. Then, a protrusion including the main magnetic pole and the first and second side gaps is formed on the pre-lower-gap portion. With the top surface of the protrusion covered with a mask, the initial lower gap layer is etched in part to thereby form the lower gap.
摘要翻译： 一种用于磁头的制造方法包括以下步骤：在下屏蔽上形成结构，该结构包括下间隙，主磁极以及第一和第二侧间隙; 形成第一和第二侧面罩; 形成上部间隙; 并形成上护罩。 在形成该结构的步骤中，在下屏蔽件上形成初始下间隙层，初始下间隙层包括预先下间隙部分，以及两个待除去部分，其位于 前下间隙部分。 然后，在前下间隙部分上形成包括主磁极和第一和第二侧间隙的突起。 在凸起的顶表面被掩模覆盖的情况下，初始的下间隙层被部分蚀刻，从而形成下间隙。
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4.发明申请Method for manufacturing perpendicular magnetic head including a main pole surrounded by shield layers 有权用于制造包括被屏蔽层包围的主极的垂直磁头的方法公开(公告)号：US20110108520A1
公开(公告)日：2011-05-12
申请号：US12591130
申请日：2009-11-10
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49044
摘要： A method of manufacturing a perpendicular magnetic head having a writing element that writes magnetic information to a recording medium includes forming a main magnetic pole part generating a magnetic field on a substrate; removing at least a part of the substrate and a material existing at a circumference of the main magnetic pole part to expose an entire circumference of the main magnetic pole part at a surface that becomes an opposing medium surface (ABS) opposite to the recording medium; forming a shield gap film that is made of a nonmagnetic material so as to cover the entire circumference of the main magnetic pole part at least at the surface that becomes the ABS; and forming a shield layer so as to cover an entire circumference of the shield gap film at least at the surface that becomes the ABS.
摘要翻译： 具有将磁信息写入记录介质的写入元件的垂直磁头的制造方法包括在基板上形成产生磁场的主磁极部， 去除所述基板的至少一部分和存在于所述主磁极部分的圆周处的材料，以在与所述记录介质相对的相对介质表面（ABS）的表面处暴露所述主磁极部分的整个周边; 形成由非磁性材料制成的屏蔽间隙膜，以便至少在成为ABS的表面上覆盖主磁极部分的整个周边; 以及形成屏蔽层，以便至少在成为ABS的表面处覆盖屏蔽间隙膜的整个周边。
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公开(公告)号：US08404431B1
公开(公告)日：2013-03-26
申请号：US13289369
申请日：2011-11-04
IPC分类号： G02B5/127
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3116 , G11B5/3166 , Y10T29/49048
摘要： A method for manufacturing a thin-film magnetic head includes processes of forming a polishing position sensor and a recording head portion alongside on one side of a wafer. The process of forming the recording head portion has a step of performing a photolithography process after applying an alkali soluble resin film and a photoresist film in the named order. The process of forming the polishing position sensor has a step of performing a photolithography process on the photoresist film while having only the photoresist film out of the alkali soluble resin film and the photoresist film.
摘要翻译： 一种制造薄膜磁头的方法包括在晶片的一侧旁边形成研磨位置传感器和记录头部的工序。 形成记录头部分的过程具有按照所述顺序施加碱溶性树脂膜和光致抗蚀剂膜之后进行光刻工艺的步骤。 形成抛光位置传感器的过程具有在光致抗蚀剂膜上进行光刻工艺的步骤，同时在碱溶性树脂膜和光致抗蚀剂膜中仅具有光致抗蚀剂膜。
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6.发明授权公开(公告)号：US08323517B2
公开(公告)日：2012-12-04
申请号：US12753557
申请日：2010-04-02
IPC分类号： B29D11/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.
摘要翻译： 形成垂直磁记录型薄膜磁头的磁极部分的方法和制造垂直磁记录型薄膜磁头的方法，该方法包括在下层上形成具有开口的抗蚀剂图案，形成 第一非磁性层，形成形成磁性层图案的第一磁性层，去除抗蚀剂图案，然后在第一非磁性层和磁性层图案上施加抗蚀剂层，在所施加的抗蚀剂层的中途显影或灰化，并烘烤剩余的抗蚀剂层 通过对所述烘烤抗蚀剂层进行蚀刻从所述磁性层图案的至少一个侧表面去除所述第一非磁性层，除去所有所述抗蚀剂层，然后在至少所述磁性层图案上形成第二非磁性层，以及形成 在形成的第二非磁性层上的第二磁性层。
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公开(公告)号：US20100302680A1
公开(公告)日：2010-12-02
申请号：US12457089
申请日：2009-06-01
IPC分类号： G11B5/23
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/315
摘要： A perpendicular magnetic write head includes: a magnetic pole having an end face on an air bearing surface; and side shield layers each having an end face on the air bearing surface, and arranged on both sides, in a write track width direction, of the magnetic pole with a side gap in between. The end face of the magnetic pole has a geometry in which a width at a trailing edge is larger than a width at a leading edge. Relationship D1
摘要翻译： 垂直磁写头包括：磁极，其在空气轴承表面上具有端面; 以及侧面屏蔽层，其各自具有位于空气轴承表面上的端面，并且布置在磁极的写入磁道宽度方向的两侧，其间具有侧面间隙。 磁极的端面具有几何形状，其中后缘处的宽度大于前缘处的宽度。 在空气轴承表面中满足关系D1
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8.发明授权Thin-film magnetic recording head with thin film which constructs sensor or heater beneath main magnetic pole 有权具有薄膜的薄膜磁记录头，其在主磁极下构造传感器或加热器公开(公告)号：US08654479B2
公开(公告)日：2014-02-18
申请号：US13535858
申请日：2012-06-28
申请人： Masashi Sano , Hiromichi Umehara , Mutsumi Fujita , Isamu Toba , Tatsuhiro Nojima , Hitoshi Hatate , Hisayoshi Watanabe
发明人： Masashi Sano , Hiromichi Umehara , Mutsumi Fujita , Isamu Toba , Tatsuhiro Nojima , Hitoshi Hatate , Hisayoshi Watanabe
IPC分类号： G11B5/127
CPC分类号： G11B5/607
摘要： A thin film magnetic recording head having a multilayer structure in which plural thin films are laminated and being a perpendicular recording type that applies a magnetic field perpendicularly to a magnetic recording medium and performs recording, includes a main magnetic pole exposed on an air bearing surface facing the magnetic recording medium and guiding a magnetic flux toward the magnetic recording medium, a thin film positioned beneath the main magnetic pole from a perspective of a lamination direction and configuring a sensor or a heater configured to determine a distance from the magnetic recording medium of the thin film magnetic recording head, and a light-absorbing portion positioned between the main magnetic pole and the thin film.
摘要翻译： 一种薄膜磁记录头，其具有层叠多个薄膜的多层结构，并且是垂直记录方式，其垂直于磁记录介质施加磁场并进行记录，该磁记录头包括暴露在空气轴承表面 磁记录介质，并向磁记录介质引导磁通量，从层叠方向的角度定位在主磁极下方的薄膜，以及配置传感器或加热器，该传感器或加热器被配置为确定与磁记录介质的距离 薄膜磁记录头和位于主磁极和薄膜之间的光吸收部分。
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9.发明授权公开(公告)号：US08472137B2
公开(公告)日：2013-06-25
申请号：US12845349
申请日：2010-07-28
申请人： Kei Hirata , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
发明人： Kei Hirata , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
CPC分类号： G11B5/6082 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： The present invention relates to a magnetic head, a manufacturing method therefor, a head assembly, and a magnetic recording/reproducing apparatus. According to the present invention, it includes a magnetic pole layer, a non-magnetic layer, a trailing gap layer, and a trailing shield layer. The magnetic pole layer has a pole tip exposed on a magnetic medium-facing surface. The non-magnetic layer is laid on the magnetic pole layer. The trailing shield layer is exposed on the magnetic medium-facing surface and laid over the magnetic pole layer and the non-magnetic layer with the trailing gap layer between. The magnetic pole layer and the non-magnetic layer have a continuous tapered face opposed to a lower side of the trailing shield layer. Moreover, the tapered face extends from a trailing edge of the pole tip at a constant inclination angle.
摘要翻译： 磁头及其制造方法技术领域本发明涉及一种磁头及其制造方法，磁头组件以及磁记录/重放装置。 根据本发明，它包括磁极层，非磁性层，后隙层和后屏蔽层。 磁极层具有暴露在面向磁介质的表面上的极尖。 非磁性层铺设在磁极层上。 后屏蔽层暴露在面向磁介质的表面上，并铺设在磁极层和非磁性层之间，后隙间隔在其间。 磁极层和非磁性层具有与后屏蔽层的下侧相对的连续锥形面。 此外，锥形面从极尖的后缘以恒定的倾斜角度延伸。
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10.发明申请公开(公告)号：US20120026629A1
公开(公告)日：2012-02-02
申请号：US12845349
申请日：2010-07-28
申请人： Kei HIRATA , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
发明人： Kei HIRATA , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
CPC分类号： G11B5/6082 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： The present invention relates to a magnetic head, a manufacturing method therefor, a head assembly, and a magnetic recording/reproducing apparatus. According to the present invention, it includes a magnetic pole layer, a non-magnetic layer, a trailing gap layer, and a trailing shield layer. The magnetic pole layer has a pole tip exposed on a magnetic medium-facing surface. The non-magnetic layer is laid on the magnetic pole layer. The trailing shield layer is exposed on the magnetic medium-facing surface and laid over the magnetic pole layer and the non-magnetic layer with the trailing gap layer between. The magnetic pole layer and the non-magnetic layer have a continuous tapered face opposed to a lower side of the trailing shield layer. Moreover, the tapered face extends from a trailing edge of the pole tip at a constant inclination angle.
摘要翻译： 磁头及其制造方法技术领域本发明涉及一种磁头及其制造方法，磁头组件以及磁记录/重放装置。 根据本发明，它包括磁极层，非磁性层，后隙层和后屏蔽层。 磁极层具有暴露在面向磁介质的表面上的极尖。 非磁性层铺设在磁极层上。 后屏蔽层暴露在面向磁介质的表面上，并铺设在磁极层和非磁性层之间，后隙间隔在其间。 磁极层和非磁性层具有与后屏蔽层的下侧相对的连续锥形面。 此外，锥形面从极尖的后缘以恒定的倾斜角度延伸。
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