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1.发明授权
公开(公告)号：US4660980A
公开(公告)日：1987-04-28
申请号：US679899
申请日：1984-12-10
CPC分类号： G01B11/06
摘要： An apparatus for measuring a thickness of an object transparent to light utilizing an interferometric method includes a light source for generating a coherent light beam to which an object to be measured is transparent, an illumination unit for radiating onto the object the incident light beam as scanned over a range of angle of incidence varying from a predetermined angle of incidence .theta..sub.A to another predetermined angle of incidence .theta..sub.B, and a photosensor unit for detecting light intensity changes resulting from changing of the optical path difference between two light beams reflected by the upper and lower surfaces of the object. A count circuit receives an output signal from the photosensor unit and counts the difference between an order of interference fringes obtained for one scan of incident light beam having the predetermined angle of incidence .theta..sub.A to that having the other predetermined angle of incidence .theta..sub.B, and a calculating circuit converts the output from the count circuit into a value corresponding to the thickness of the object.
摘要翻译： 一种利用干涉测量方法测量透明光的物体的厚度的装置包括：用于产生待测物体透明的相干光束的光源;照射单元，用于将扫描的入射光束照射到物体上 在从预定入射角θA变化到另一预定入射角θB的入射角范围之间;以及光电传感器单元，用于检测由上部反射的两个光束之间的光程差的变化引起的光强度变化 和物体的下表面。 计数电路接收来自光电传感器单元的输出信号，并且计算对具有预定入射角θ的入射光束的一次扫描获得的干涉条纹的顺序与具有另一预定入射角度θ的入射光束的干涉条纹的顺序之间的差，以及 计算电路将来自计数电路的输出转换成对应于对象的厚度的值。
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2.发明授权
公开(公告)号：US5043570A
公开(公告)日：1991-08-27
申请号：US550971
申请日：1990-07-10
申请人： Hitoshi Takabayashi
发明人： Hitoshi Takabayashi
CPC分类号： G02B21/002
摘要： An optical system including a wave source radiates a converging wave to an object. A first memory stores a function g (x,y) representing the intensity distribution of the converging wave at a substantially beam waist section thereof. A scanning system directs the converging wave on the object at a substantially beam waist position, and operates so as to scan the converging wave on the object. A detector detects the intensity of a secondary wave generated by interaction between the converging wave and the object in accordance with a scanning operation of the scanning means. A second memory stores a positional function I (x,y) representing the intensity distribution of the secondary wave detected by the detector. In order to obtain a sensitivity distribution representing the intensity of the interaction between the object and the converging wave, an arithmetic unit obtains a function f (x,y) such that the function I(x,y) stored in the second memory satisfies convolution integration of the function g (x,y) stored in the first memory and the function f(x,y).
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