公开(公告)号：US06848882B2

公开(公告)日：2005-02-01

申请号：US10404991

申请日：2003-03-31

申请人： Ho-Jen Chen ,  Fan-Lin Lu ,  Ko-Chin Chung ,  Yu-Tan Tseng

发明人： Ho-Jen Chen ,  Fan-Lin Lu ,  Ko-Chin Chung ,  Yu-Tan Tseng

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67763 ,  H01L21/67775 ,  Y10S414/14

摘要： An apparatus and a method for positioning a cassette pod onto a loadport by an overhead hoist transport system are described. The apparatus includes a vertical front panel of a process machine equipped with a docking opening therein, a loadport stage extending horizontally from the vertical front panel, a loadport situated on the loadport stage, at least two back guiding plates situated on the back of the loadport, at least two side guiding plates with one situated on each side of the loadport, a front guiding plate situated on the front side of the loadport, and a clamp positioner for guiding the position of an OHT clamp during an unloading operation of the cassette pod. The two halves of the clamp positioner move sideways away from each other to allow the cassette pod to pass therethrough during a loading operation.

摘要翻译： 描述了一种用于通过架空式起重机输送系统将盒式吊架定位在承载端口上的装置和方法。 该装置包括一个在其中配备有对接开口的处理机械的垂直前面板，从垂直前面板水平延伸的装载口台，位于承载台上的装载口，位于装载口背面的至少两个后导向板 至少两个侧导板，其中一个位于装载口的每一侧上，前导向板位于装载口的前侧，夹紧定位器用于在盒式磁带盒的卸载操作期间引导OHT夹具的位置 。 夹紧定位器的两个半部彼此横向移动，以允许盒式盒在加载操作期间通过。