公开(公告)号：US06848882B2

公开(公告)日：2005-02-01

申请号：US10404991

申请日：2003-03-31

申请人： Ho-Jen Chen ,  Fan-Lin Lu ,  Ko-Chin Chung ,  Yu-Tan Tseng

发明人： Ho-Jen Chen ,  Fan-Lin Lu ,  Ko-Chin Chung ,  Yu-Tan Tseng

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67763 ,  H01L21/67775 ,  Y10S414/14

摘要： An apparatus and a method for positioning a cassette pod onto a loadport by an overhead hoist transport system are described. The apparatus includes a vertical front panel of a process machine equipped with a docking opening therein, a loadport stage extending horizontally from the vertical front panel, a loadport situated on the loadport stage, at least two back guiding plates situated on the back of the loadport, at least two side guiding plates with one situated on each side of the loadport, a front guiding plate situated on the front side of the loadport, and a clamp positioner for guiding the position of an OHT clamp during an unloading operation of the cassette pod. The two halves of the clamp positioner move sideways away from each other to allow the cassette pod to pass therethrough during a loading operation.

摘要翻译： 描述了一种用于通过架空式起重机输送系统将盒式吊架定位在承载端口上的装置和方法。 该装置包括一个在其中配备有对接开口的处理机械的垂直前面板，从垂直前面板水平延伸的装载口台，位于承载台上的装载口，位于装载口背面的至少两个后导向板 至少两个侧导板，其中一个位于装载口的每一侧上，前导向板位于装载口的前侧，夹紧定位器用于在盒式磁带盒的卸载操作期间引导OHT夹具的位置 。 夹紧定位器的两个半部彼此横向移动，以允许盒式盒在加载操作期间通过。

公开(公告)号：US06950181B2

公开(公告)日：2005-09-27

申请号：US10404872

申请日：2003-03-31

申请人： Ho-Jen Chen ,  Ton-Lee Lee ,  Ko-Chin Chung ,  Fan-Lin Lu

发明人： Ho-Jen Chen ,  Ton-Lee Lee ,  Ko-Chin Chung ,  Fan-Lin Lu

IPC分类号： H01L21/00 ,  G01J1/42

CPC分类号： H01L21/67259

摘要： A wafer presence optical sensor system comprises a transfer chamber adapted to receive a wafer, an optical sensor comprising means emitting a sensing beam and means receiving a beam reflected from the wafer to ascertain wafer presence in the chamber, and means to reflect away the sensing beam when reaching a chamber bottom. The reflecting means includes an oblique area made in an inner surface of the chamber bottom or, alternatively, a body with an oblique area placed on the inner surface. Reflecting away the sensing beam when no wafer is present in the transfer chamber prevents the receiving means from receiving the beam reflected from the chamber bottom and thus thwarts the misinterpretation of wafer presence.

摘要翻译： 晶片存在光学传感器系统包括适于接收晶片的传送室，包括发射感测光束的装置的光学传感器和接收从晶片反射的光束以确定晶片在腔室中的存在的装置，以及反射离开感测光束的装置 到达室底时。 反射装置包括在室底部的内表面中制成的倾斜区域，或者替代地，在内表面上具有倾斜区域的主体。 在传送室中没有晶片时反射感测光束，防止接收装置接收从室底部反射的光束，从而阻碍晶片存在的误解。

公开(公告)号：US06678581B2

公开(公告)日：2004-01-13

申请号：US10047331

申请日：2002-01-14

申请人： Kwun-Goo Hung ,  Tung-Li Lee ,  Ko-Chin Chung ,  Fan-Lin Lu

发明人： Kwun-Goo Hung ,  Tung-Li Lee ,  Ko-Chin Chung ,  Fan-Lin Lu

IPC分类号： G06F1900

CPC分类号： H01L21/68707

摘要： A method of calibrating a wafer edge gripping end effector. A wafer calibration tool is held in a stationary position simulating the position of a semiconductor wafer to be picked up by the wafer edge gripping end effector. A controller associated with a robot having an end effector attached to a robot arm thereto is turned off. The robot arm and end effector are moved to position where the first and second clamp structures on the end effector each engage a respective inner edge that in part defines a notch formed in the wafer calibration tool. An actuator driven movable clamp structure is manually advanced so that the movable clamp structure engages an inner edge that in part defines one of the notches formed in the wafer calibration tool. The controller is turned on and data regarding the location of robot arm, end effector and movable clamp structure is stored.

摘要翻译： 一种校准晶片边缘夹持端部执行器的方法。 晶片校准工具被保持在模拟由晶片边缘夹持端部执行器拾取的半导体晶片的位置的静止位置。 关闭与机器人相关联的控制器，其具有附接到机器人手臂的末端执行器。 机器人臂和末端执行器被移动到位于末端执行器上的第一和第二夹紧结构各自接合相应的内边缘的位置，该内边缘部分地限定在晶片校准工具中形成的切口。 致动器驱动的可动夹紧结构被手动推进，使得可移动夹具结构接合内边缘，该内边缘部分地限定在晶片校准工具中形成的凹口中的一个。 打开控制器，并存储关于机器人臂，末端执行器和可移动夹具结构的位置的数据。

公开(公告)号：US07873498B2

公开(公告)日：2011-01-18

申请号：US12385609

申请日：2009-04-14

申请人： Wei-Yu Chien ,  Ko-Chin Chung

发明人： Wei-Yu Chien ,  Ko-Chin Chung

IPC分类号： G06F11/07

CPC分类号： G06F11/2294 ,  G06F11/3089

摘要： The invention discloses a remote hardware inspection system, including a remote monitor station and a client server. The monitor station includes a hardware inspection unit and a first network interface. The hardware inspection unit is for generating a hardware inspection command which is transmitted to the server by the first network interface. The server includes a second network interface, an input/output unit, and a managing/controlling unit. The input/output unit has an inspection program. The second network interface receives the hardware inspection command and transmits it to the managing/controlling unit. In response to the hardware inspection command, the managing/controlling unit generates and transmits a trigger signal to the input/output unit to implement the inspection program. Thereby, the inspection program writes data into the target hardware of the server according to the content of the hardware inspection command.

摘要翻译： 本发明公开了一种远程硬件检测系统，包括远程监控站和客户服务器。 监视站包括硬件检查单元和第一网络接口。 硬件检查单元用于生成由第一网络接口发送到服务器的硬件检查命令。 服务器包括第二网络接口，输入/输出单元和管理/控制单元。 输入/输出单元具有检查程序。 第二网络接口接收硬件检查命令并将其发送给管理/控制单元。 响应于硬件检查命令，管理/控制单元产生并向输入/输出单元发送触发信号以实现检查程序。 因此，检查程序根据硬件检查指令的内容将数据写入服务器的目标硬件。

公开(公告)号：US20100180157A1

公开(公告)日：2010-07-15

申请号：US12385609

申请日：2009-04-14

申请人： Wei-Yu Chien ,  Ko-Chin Chung

发明人： Wei-Yu Chien ,  Ko-Chin Chung

IPC分类号： G06F11/07

CPC分类号： G06F11/2294 ,  G06F11/3089

摘要： The invention discloses a remote hardware inspection system, including a remote monitor station and a client server. The monitor station includes a hardware inspection unit and a first network interface. The hardware inspection unit is for generating a hardware inspection command which is transmitted to the server by the first network interface. The server includes a second network interface, an input/output unit, and a managing/controlling unit. The input/output unit has an inspection program. The second network interface receives the hardware inspection command and transmits it to the managing/controlling unit. In response to the hardware inspection command, the managing/controlling unit generates and transmits a trigger signal to the input/output unit to implement the inspection program. Thereby, the inspection program writes data into the target hardware of the server according to the content of the hardware inspection command.

摘要翻译： 本发明公开了一种远程硬件检测系统，包括远程监控站和客户服务器。 监视站包括硬件检查单元和第一网络接口。 硬件检查单元用于生成由第一网络接口发送到服务器的硬件检查命令。 服务器包括第二网络接口，输入/输出单元和管理/控制单元。 输入/输出单元具有检查程序。 第二网络接口接收硬件检查命令并将其发送给管理/控制单元。 响应于硬件检查命令，管理/控制单元产生并向输入/输出单元发送触发信号以实现检查程序。 因此，检查程序根据硬件检查指令的内容将数据写入服务器的目标硬件。