公开(公告)号：US6047719A

公开(公告)日：2000-04-11

申请号：US218031

申请日：1998-12-22

申请人： Horst Ruther ,  Roland Raith

发明人： Horst Ruther ,  Roland Raith

IPC分类号： G05D11/13

CPC分类号： G05D11/132 ,  Y10T137/0329 ,  Y10T137/86461 ,  Y10T137/87684

摘要： In a gas mixing system for producing high-precision, continuous streams of mixed gas consisting of a plurality of individually metered gas components, with an individual gas line including a pressure reducing element and, if desired, a precision pressure regulator for each gas component, precision is further improved by providing that each gas line lead to a separate valve which is timed by electronic control means, the valves being connected at the input side via a jointly vented system of lines for pressure equalization, and communicating at the output side via a mixed gas line with a mixing chamber downstream thereof.

摘要翻译： 在用于生产由多个单独计量的气体组分组成的高精度，连续的混合气体流的气体混合系统中，每个气体管线包括减压元件，并且如果需要，每个气体组分的精密压力调节器， 通过提供每个气体管线导致由电子控制装置定时的单独的阀，进一步提高了精度，该阀通过用于压力平衡的共同排放的管线系统在输入侧连接，并且在输出侧通过 混合气体管线与其下游的混合室。