公开(公告)号：US07047620B2

公开(公告)日：2006-05-23

申请号：US10671814

申请日：2003-09-26

申请人： Hsiu-Chieh Chen ,  Hsiao-Ping Hsieh ,  Wen-Kan Hu ,  Wen-Chin Wu

发明人： Hsiu-Chieh Chen ,  Hsiao-Ping Hsieh ,  Wen-Kan Hu ,  Wen-Chin Wu

IPC分类号： B23Q3/00

CPC分类号： H01L21/67046 ,  Y10T29/49009 ,  Y10T29/49826 ,  Y10T29/49895 ,  Y10T29/53143 ,  Y10T29/53961

摘要： The present invention relates to a method of assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at a predetermined angle with respect to a longitudinal axis of the shaft when properly assembled. In one embodiment, the method comprises providing a tool body configured to partially receive the scrubber, the tool body including a first recess and a protrusion; and placing the tool body adjacent the scrubber to at least partially receive the shaft pin into the first recess of the tool body and to at least partially insert the protrusion of the tool body into the notch of the disk. The first recess and the protrusion are arranged at the predetermined angle to position the notch of the disk and the shaft pin of the scrubber for proper assembly at the predetermined angle with respect to the longitudinal axis of the shaft.

摘要翻译： 本发明涉及一种组装洗涤器的方法，该洗涤器包括电动机，可旋转地联接到电机上并延伸穿过电动机的轴，可拆卸地连接到轴的轴销和联接到轴的盘，并且具有相对于 所述轴销在正确组装时相对于所述轴的纵向轴线以预定角度。 在一个实施例中，该方法包括提供构造成部分地接收洗涤器的工具主体，工具主体包括第一凹部和突起; 以及将所述工具主体放置在所述洗涤器附近以至少部分地将所述轴销接收到所述工具主体的所述第一凹部中，并且至少部分地将所述工具主体的突起部分插入所述盘的凹口中。 第一凹部和突出部以预定角度布置，以将盘的凹口和洗涤器的轴销定位成相对于轴的纵向轴线以预定角度正确组装。

公开(公告)号：US06647607B2

公开(公告)日：2003-11-18

申请号：US10074953

申请日：2002-02-11

申请人： Hsiu-Chieh Chen ,  Hsiao-Ping Hsieh ,  Wen-Kan Hu ,  Wen-Chin Wu

发明人： Hsiu-Chieh Chen ,  Hsiao-Ping Hsieh ,  Wen-Kan Hu ,  Wen-Chin Wu

IPC分类号： B25B2714

CPC分类号： H01L21/67046 ,  Y10T29/49009 ,  Y10T29/49826 ,  Y10T29/49895 ,  Y10T29/53143 ,  Y10T29/53961

摘要： The present invention relates to an auxiliary tool for assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at a predetermined angle with respect to a longitudinal axis of the shaft when properly assembled. In specific embodiments, the auxiliary tool comprises a tool body configured to at least partially receive the motor, the shaft pin, the disk, and the notch of the disk. The tool body includes a first recess configured to at least partially receive the shaft pin and a protrusion configured to be at least partially received into the notch of the disk. The first recess and the protrusion are arranged at the predetermined angle to position the notch of the disk and the shaft pin of the scrubber for proper assembly at the predetermined angle with respect to the longitudinal axis of the shaft.

公开(公告)号：US06751850B2

公开(公告)日：2004-06-22

申请号：US10006224

申请日：2001-12-10

申请人： Wen-Ken Hu ,  Hsiao-Ping Hsieh ,  Zhi-Zhao Tai ,  Mark Wang

发明人： Wen-Ken Hu ,  Hsiao-Ping Hsieh ,  Zhi-Zhao Tai ,  Mark Wang

IPC分类号： B23P1900

CPC分类号： H01J37/3447 ,  C23C14/34 ,  C23C14/564 ,  Y10T29/53 ,  Y10T29/53961

摘要： An assembly station for a sputter shield assembly provides a work bench for assembling and disassembling the sputter shield assembly. The shield assembly has a clamp shield facing downwards to hold the shield assembly which is turned over by 180 degrees, and includes at least three bottom rim support arms for supporting the clamp shield and bearing the weight of the shield assembly, and at least three inner rim retaining arms for contacting the inner rim formed by the shield and the clamp shield. The invention provides a changed support means for holding the shield assembly on the assembly station so that one person is enough to do the assembly and disassembly of the shield assembly, and thus save manpower and operation time.

摘要翻译： 用于溅射屏蔽组件的装配站提供用于组装和拆卸溅射屏蔽组件的工作台。 屏蔽组件具有面向下的夹持屏蔽件，以将屏蔽组件保持180度，并且包括至少三个底部边缘支撑臂，用于支撑夹具屏蔽并承载屏蔽组件的重量，并且至少三个内部 用于接触由护罩和夹具护罩形成的内缘的轮辋保持臂。 本发明提供了一种用于将屏蔽组件保持在组装工位上的改变的支撑装置，使得一个人足以进行屏蔽组件的组装和拆卸，从而节省人力和操作时间。

公开(公告)号：US06543980B2

公开(公告)日：2003-04-08

申请号：US09863329

申请日：2001-05-24

申请人： Hsien Hsiang Lin ,  Thanku Shieh ,  Wen-Ching Wu ,  Hsiao-Ping Hsieh

发明人： Hsien Hsiang Lin ,  Thanku Shieh ,  Wen-Ching Wu ,  Hsiao-Ping Hsieh

IPC分类号： G11B1568

CPC分类号： H01L21/68 ,  G05B2219/39014 ,  G05B2219/39041 ,  G05B2219/45031 ,  H01L21/67259

摘要： A teaching tool for a robot arm for wafer reaction ovens is provided to anchor the robot arm with respect to a tray located inside a reaction oven. The teaching tool provides an upper flange for maintaining a spacing between a handle of the robot arm and a door of the oven, a position width for keeping the teaching tool aligning with a center line of the tray, and a lower tunnel aligning with the center line for allowing a blade of the robot arm to contact closely and horizontally from a lower position and thus for maintaining a position height between the blade and a floor of the reaction oven. By providing the teaching tool, easy blind calibration with multiple contact points between the robot arm and the oven can be performed so that possible efficiency down and cost up from an ill-calibration can be reduced to a minimum.