公开(公告)号：US20060000711A1

公开(公告)日：2006-01-05

申请号：US10907917

申请日：2005-04-20

申请人： Hung-Hsiang Lin ,  Kun-Yang Lin ,  Shun-Li Hong ,  Yuh-Lang Lee ,  Yu-Zen Shen

发明人： Hung-Hsiang Lin ,  Kun-Yang Lin ,  Shun-Li Hong ,  Yuh-Lang Lee ,  Yu-Zen Shen

IPC分类号： G01N27/26

CPC分类号： G01N27/205 ,  G01N17/00

摘要： An in-situ and real-time corrosion controlling system for chemical vessels, tanks or reactors is disclosed. The chemical vessels, tanks or reactors are employed to contain high-purity corrosive chemicals such as acids, alkaline liquids or the like. The controlling system encompasses a vessel including a conductive shell and insulating interior lining coated therein. A robust detection electrode is dipped into the chemical liquid contained by the vessel. The detection electrode is electrically connected to a measurement means such as an ohmmeter that is mounted outside the vessel. The measurement means is further electrically connected to the conductive shell. When the interior lining is pitted due to the chemical attack by the chemical liquid and the chemical liquid contacts the conductive shell, the measurement means promptly receives a corresponding signal. According to one preferred embodiment, the measurement means is further connected to a controller unit that can control a semiconductor-processing unit.

摘要翻译： 公开了用于化学容器，罐或反应器的原位和实时腐蚀控制系统。 使用化学容器，罐或反应器来容纳高纯度的腐蚀性化学物质，例如酸，碱性液体等。 该控制系统包括一个容器，该容器包括导电壳体和涂覆在其中的绝缘内衬。 将坚固的检测电极浸入容器所含的化学液体中。 检测电极电连接到诸如安装在容器外部的欧姆计的测量装置。 测量装置进一步电连接到导电外壳。 当内衬由于化学液体的化学侵蚀而引起内部化学液体接触导电外壳时，测量装置会迅速接收相应的信号。 根据一个优选实施例，测量装置还连接到可控制半导体处理单元的控制器单元。

公开(公告)号：US20060011475A1

公开(公告)日：2006-01-19

申请号：US10710271

申请日：2004-06-30

申请人： Hung-Hsiang Lin ,  Kun-Yang Lin ,  Shun-Li Hong ,  Yuh-Lang Lee ,  Yu-Zen Shen

发明人： Hung-Hsiang Lin ,  Kun-Yang Lin ,  Shun-Li Hong ,  Yuh-Lang Lee ,  Yu-Zen Shen

IPC分类号： G01N27/26

CPC分类号： G01N27/205 ,  G01N17/00

摘要： An in-situ and real-time monitoring and controlling system for chemical vessels, tanks, reactors or the like is disclosed. The chemical vessels, tanks, or reactors are employed to contain high-purity corrosive chemicals such as acids, alkaline liquids or the like. The monitoring and controlling system encompasses a vessel including a conductive shell and insulating interior lining coated therein. A robust detection electrode is dipped into the chemical liquid contained by the vessel. The detection electrode is electrically connected to a measurement means such as an ohmmeter that is mounted outside the vessel. The measurement means is further electrically connected to the conductive shell. When the interior lining is pitted due to the chemical attack by the chemical liquid and the chemical liquid contacts the conductive shell, the measurement means promptly receives a corresponding signal. According to one preferred embodiment, the measurement means is further connected to a controller unit that can control a semi-conductor-processing unit.

摘要翻译： 公开了一种用于化学容器，罐，反应器等的原位和实时监测和控制系统。 使用化学容器，罐或反应器来容纳高纯度的腐蚀性化学物质，如酸，碱性液体等。 监测和控制系统包括一个容器，它包括一个导电壳体和一个涂覆在其中的绝缘内部衬里。 将坚固的检测电极浸入容器所含的化学液体中。 检测电极电连接到诸如安装在容器外部的欧姆计的测量装置。 测量装置进一步电连接到导电外壳。 当内衬由于化学液体的化学侵蚀而引起内部化学液体接触导电外壳时，测量装置会迅速接收相应的信号。 根据一个优选实施例，测量装置进一步连接到可控制半导体处理单元的控制器单元。