-
公开(公告)号：US20090165718A1
公开(公告)日：2009-07-02
申请号：US12344489
申请日：2008-12-27
IPC分类号： C23C16/00
CPC分类号： C23C14/12 , C23C14/243 , C23C14/246 , C23C14/26
摘要： Provided are a gas injector and a film deposition apparatus having the same. The gas injector includes a body, a supply hole, an injection hole, and a distribution plate. The body is configured to provide an inner space therein. The supply hole is formed in an upper surface of the body to communicate with the inner space and receive a raw material. The injection hole is formed in a lower surface of the body to communicate with the inner space and inject the raw material. The distribution plate is disposed in the inner space of the body. A through hole is formed in the distribution plate. The distribution plate is disposed to be inclined at a predetermined angle with respect to a horizontal plane. The gas injector can uniformly inject the raw material and improve vaporization efficiency of the raw material having a powder form.
摘要翻译： 提供了一种气体注入器和具有该气体注入器的成膜装置。 气体喷射器包括主体，供给孔，喷射孔和分配板。 身体构造成在其中提供内部空间。 供应孔形成在主体的上表面中以与内部空间连通并且接收原料。 注入孔形成在主体的下表面中，与内部空间连通并注入原料。 分配板设置在主体的内部空间中。 在分配板上形成通孔。 分配板相对于水平面倾斜预定角度。 气体喷射器可以均匀地注入原料并提高具有粉末形式的原料的蒸发效率。
-
公开(公告)号：US08628621B2
公开(公告)日：2014-01-14
申请号：US12344489
申请日：2008-12-27
CPC分类号： C23C14/12 , C23C14/243 , C23C14/246 , C23C14/26
摘要： Provided are a gas injector and a film deposition apparatus having the same. The gas injector includes a body, a supply hole, an injection hole, and a distribution plate. The body is configured to provide an inner space therein. The supply hole is formed in an upper surface of the body to communicate with the inner space and receive a raw material. The injection hole is formed in a lower surface of the body to communicate with the inner space and inject the raw material. The distribution plate is disposed in the inner space of the body. A through hole is formed in the distribution plate. The distribution plate is disposed to be inclined at a predetermined angle with respect to a horizontal plane. The gas injector can uniformly inject the raw material and improve vaporization efficiency of the raw material having a powder form.
摘要翻译： 提供了一种气体注入器和具有该气体注入器的成膜装置。 气体喷射器包括主体，供给孔，喷射孔和分配板。 身体构造成在其中提供内部空间。 供应孔形成在主体的上表面中以与内部空间连通并且接收原料。 注入孔形成在主体的下表面中，与内部空间连通并注入原料。 分配板设置在主体的内部空间中。 在分配板上形成通孔。 分配板相对于水平面倾斜预定角度。 气体喷射器可以均匀地注入原料并提高具有粉末形式的原料的蒸发效率。
-
搜索结果
2 条记录 (耗时 0.024 秒)
