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公开(公告)号：US3281714A
公开(公告)日：1966-10-25
申请号：US33472263
申请日：1963-12-31
Applicant: IBM
Inventor： HAERING RUDOLPH R , MILLER PETER B
CPC classification number: H01L33/0037 , H01S5/30 , H01S5/32
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