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公开(公告)号：US3493770A
公开(公告)日：1970-02-03
申请号：US3493770D
申请日：1966-03-01
Applicant: IBM
Inventor： DESSAUER RALPH G , PATZNER EUGENE J , POPONIAK MICHAEL R
IPC: C30B15/26 , H01L21/208 , H01J39/12 , G01N21/26
CPC classification number: C30B15/26 , Y10T117/1008 , Y10T117/1072
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