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公开(公告)号：US2986591A
公开(公告)日：1961-05-30
申请号：US54092555
申请日：1955-10-17
Applicant: IBM
Inventor： SWANSON JOHN A , HORTON PAUL V
IPC: G21H1/06 , H01L31/075
CPC classification number: G21H1/06 , H01L31/075 , Y02E10/548
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