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1.发明授权Vacuum evaporation coating apparatus including means for precleaning substrates by ion bombardment 失效真空蒸镀涂装装置，包括用离子BOMBARDMDM预处理基板的方法
公开(公告)号：US3507248A
公开(公告)日：1970-04-21
申请号：US3507248D
申请日：1967-06-15
Applicant: IBM
Inventor： SEELEY GERARD , TOTTA PAUL A , WALD GEORGE
CPC classification number: C23C14/022 , C23C14/541 , Y10S148/169
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