公开(公告)号：US11944965B2

公开(公告)日：2024-04-02

申请号：US16880247

申请日：2020-05-21

Applicant: IMEC VZW

Inventor： Giuseppe Fiorentino ,  Simone Severi ,  Aurelie Humbert

IPC: B81C1/00 ,  B01L3/00 ,  B29C65/02

CPC classification number: B01L3/502715 ,  B01L3/502707 ,  B29C65/02 ,  B81C1/00119 ,  B01L2200/10 ,  B01L2300/0838 ,  B01L2300/0887 ,  B81C2201/013 ,  B81C2203/03 ,  B81C2203/031 ,  B81C2203/036

Abstract: A microfluidic device, a diagnostic device including the microfluidic device and a method for making the microfluidic device are provided. The microfluidic device includes: (i) a transparent substrate comprising a cavity, the cavity opening up to a top of the transparent substrate; (ii) a transparent layer covering the cavity, and (iii) a semiconductor substrate over the transparent layer and the transparent substrate, wherein the semiconductor substrate comprises a through hole overlaying the cavity and exposing the transparent layer.

公开(公告)号：US20210300752A1

公开(公告)日：2021-09-30

申请号：US17203026

申请日：2021-03-16

Applicant: IMEC VZW

Inventor： Giuseppe Fiorentino ,  Aurelie Humbert ,  Simone Severi ,  Benjamin Jones

IPC: B81C1/00

Abstract: A method for fabricating a microfluidic device includes providing an assembly that includes a first silicon substrate having a hydrophilic silicon oxide top surface that includes a microfluidic channel and a second silicon substrate having a hydrophilic silicon oxide bottom surface directly bonded on the top surface of the first silicon substrate, the second silicon substrate including fluidic access holes giving fluidic access to the microfluidic channel. The method also includes exposing the assembly to oxidative species including one or more oxygen atoms and to heat so as to form silicon oxide at a surface of the access holes and of the microfluidic channel.