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公开(公告)号:US20190172913A1
公开(公告)日:2019-06-06
申请号:US16171627
申请日:2018-10-26
Applicant: IMEC VZW
Inventor: Hu Liang , Xiuju Zhou , Geert Eneman
IPC: H01L29/20 , H01L29/778 , H01L29/78 , H01L29/16 , H01L29/66 , H01L33/32 , H01L33/00 , H01L29/04 , H01L21/02
Abstract: A semiconductor structure and a method for forming the semiconductor structure are provided. The method includes: providing a monocrystalline substrate having an upper surface covered with a masking layer comprising at least one opening exposing the upper surface; filling the opening by epitaxially growing therein a first layer comprising a first Group III-nitride compound; and growing the first layer further above the opening and on the masking layer by epitaxial lateral overgrowth, wherein the at least one opening has a top surface defined by three or more straight edges forming a polygon parallel to the upper surface and oriented in such a way with respect to the crystal lattice of the monocrystalline substrate so as to permit the epitaxial lateral overgrowth of the first layer in a direction perpendicular to at least one of the edges, thereby forming the semiconductor structure as an elongated structure.