公开(公告)号：US20190025341A1

公开(公告)日：2019-01-24

申请号：US16026428

申请日：2018-07-03

Applicant: IMEC vzw

Inventor： Kristof Paredis ,  Umberto Celano ,  Wilfried Vandervorst ,  Oberon Dixon-Luinenburg

IPC: G01Q60/30

Abstract: A method of measuring an electrical characteristic of a current path is disclosed. In one aspect, the method includes a probe for scanning spreading resistance microscopy (SSRM), a test sample contacted by the probe, a back contact on the test sample, a bias voltage source and a logarithmic SSRM amplifier, when a modulation at a predefined frequency is applied to either the contact force of the probe or to the bias voltage, the device comprising electronic circuitry for producing in real time a signal representative of the electrical characteristic, according to the formula lognA=±VSSRM±logn(dV)+Vmultiplier.