公开(公告)号：US20140093744A1

公开(公告)日：2014-04-03

申请号：US14097633

申请日：2013-12-05

Applicant: IMRA AMERICA, INC.

Inventor： ZHENDONG HU ,  Yong Che ,  Bing Liu

IPC: C30B23/08 ,  C30B29/16 ,  C23C14/28

CPC classification number: C30B23/08 ,  C23C14/083 ,  C23C14/28 ,  C30B29/16

Abstract: A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.

Abstract translation: 使用二氧化钛或金属钛靶的超快速脉冲激光烧蚀将金属氧化物如结晶二氧化钛（TiO 2）的纳米颗粒或纳米复合材料（纳米颗粒组装的）膜沉积到基底表面上的一步和室温方法。 该系统包括脉冲激光，其脉冲持续时间范围从几飞秒到几十皮秒，用于处理激光束的光学设置，使得光束以适当的平均能量密度和适当的能量聚焦到目标表面上 密度分布，以及真空室，其中安装了目标物和基质，背景气体及其压力被适当调节。