公开(公告)号：US20220190475A1

公开(公告)日：2022-06-16

申请号：US17135538

申请日：2020-12-28

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Joseph Poujiong WANG ,  Chia Ching HUANG ,  Wei-Ji CHEN ,  Yueh-Lin TSAI

IPC: H01Q3/38 ,  H01Q3/28 ,  H01Q3/26

Abstract: A frequency reconfigurable phased array system comprises a signal generator outputting a power signal with an adjustable frequency, a plurality of radio frequency (RF) modules receiving the power signal, a control module generating excitation mode parameter sets and material processing event sets, a first database storing the excitation mode parameter sets, and a second database storing the material processing event sets. The control module generates a material processing schedule by selecting one of the material processing event sets based on a material recipe, an average power, and a total time of a material, and controls a signal frequency of the signal generator according to the material processing schedule and the excitation mode parameter sets, and a RF phase and a RF power of each of the RF modules, to have the RF modules generating a power signal.