SCATTERING MEASUREMENT SYSTEM AND METHOD
    3.
    发明申请
    SCATTERING MEASUREMENT SYSTEM AND METHOD 审中-公开
    散射测量系统和方法

    公开(公告)号:US20170045355A1

    公开(公告)日:2017-02-16

    申请号:US14974892

    申请日:2015-12-18

    CPC classification number: G01B11/24 G01B2210/56 H01L22/12

    Abstract: A scattering measurement system is provided, including: a light source generator for generating a detection light beam with multi-wavelengths, wherein the detection light beam is incident on an object so as to generate a plurality of multi-order diffraction light beams with three-dimensional feature information; a spatial filter for filtering out zero-order light beams from the plurality of multi-order diffraction light beams; and a detector having a photosensitive array for receiving the plurality of multi-order diffraction light beams filtered out by the spatial filter and converting the filtered plurality of multi-order diffraction light beams into multi-order diffraction signals with the three-dimensional feature information. As such, the three-dimensional structure of the object can be obtained by comparing the multi-order diffraction signals with a database.

    Abstract translation: 提供了一种散射测量系统,包括:用于产生具有多波长的检测光束的光源发生器,其中检测光束入射到物体上,以便产生多个三阶衍射光束, 三维特征信息; 用于滤除来自所述多个多级衍射光束的零级光束的空间滤波器; 以及检测器,其具有用于接收由空间滤波器滤除的多个多级衍射光束的光敏阵列,并将经滤波的多个多阶衍射光束转换成具有三维特征信息的多阶衍射信号。 因此,可以通过将多阶衍射信号与数据库进行比较来获得对象的三维结构。

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