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公开(公告)号：US20180172748A1
公开(公告)日：2018-06-21
申请号：US15393271
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Mean-Jue Tung , Shi-Yuan Tong , Yu-Ting Huang , Ming-Da Yang
CPC classification number: G01R29/12 , H01L21/67253 , H01L21/67288
Abstract: An electrostatic detecting system and an electrostatic detecting method for detecting the static electricity generated at an active surface of a substrate are provided. The electrostatic detecting system includes a sensing apparatus and a signal processing apparatus. The sensing apparatus is disposed at least adjacent to a back surface opposite to the active surface of the substrate, for measuring the static electricity generated at the active surface and generating an initial electric signal. The signal processing apparatus is electrically connected to the sensing apparatus, for receiving the initial electric signal and correcting the initial electric signal based on a voltage compensation value to obtain a final electric signal.
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公开(公告)号：US10656193B2
公开(公告)日：2020-05-19
申请号：US15393271
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Mean-Jue Tung , Shi-Yuan Tong , Yu-Ting Huang , Ming-Da Yang
Abstract: An electrostatic detecting system and an electrostatic detecting method for detecting the static electricity generated at an active surface of a substrate are provided. The electrostatic detecting system includes a sensing apparatus and a signal processing apparatus. The sensing apparatus is disposed at least adjacent to a back surface opposite to the active surface of the substrate, for measuring the static electricity generated at the active surface and generating an initial electric signal. The signal processing apparatus is electrically connected to the sensing apparatus, for receiving the initial electric signal and correcting the initial electric signal based on a voltage compensation value to obtain a final electric signal.
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公开(公告)号：US11913981B2
公开(公告)日：2024-02-27
申请号：US17129675
申请日：2020-12-21
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Mean-Jue Tung , Ming-Da Yang , Shi-Yuan Tong , Yu-Ting Huang , Chun-Pin Wu
Abstract: An electrostatic sensing system configured to sense an electrostatic information of a fluid inside a fluid distribution component and including an electrostatic sensing assembly, a signal amplifier and an analog-to-digital converter. The electrostatic sensing assembly includes a sensing component, and a shield. The sensing component is configured to be disposed at the fluid distribution component. The sensing component is disposed through the fluid distribution component so as to be partially located in the fluid distribution component. The shield surrounds a part of the sensing component that is located in the fluid distribution component. At least part of the shield is located on an upstream side of the sensing component. The signal amplifier is electrically connected to the sensing component. The analog-to-digital converter is electrically connected to the signal amplifier. The shield has an opening spaced apart from the sensing component.
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公开(公告)号：US20130154973A1
公开(公告)日：2013-06-20
申请号：US13710465
申请日：2012-12-11
Applicant: Industrial Technology Research Institute
Inventor： Mean-Jue Tung , Wen-Song Ko , Yu-Ting Huang , Ming-Da Yang
IPC: G06F3/041
Abstract: A touch pad with a feedback function and a touch device using the same are provided. The provided touch pad includes a touch sensing film layer and a vibration film layer, where the vibration film layer is disposed above the touch sensing film layer and includes a permanent charge layer. Moreover, the vibration film layer is configured for generating vibration in response to a touch event on the touch sensing film layer.
Abstract translation: 提供具有反馈功能的触摸板和使用其的触摸装置。 提供的触摸板包括触摸感测膜层和振动膜层，其中振动膜层设置在触摸感测膜层上方并且包括永久电荷层。 此外，振动膜层被配置为响应于触摸感测膜层上的触摸事件而产生振动。
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