公开(公告)号：US10422744B2

公开(公告)日：2019-09-24

申请号：US15723796

申请日：2017-10-03

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Ting-Wei Chang ,  Yuan-Chin Lee ,  Chi-Shen Chang ,  Hung-Chih Chiang ,  Shuen-Chen Chen

IPC: G01N21/45 ,  G01B9/00 ,  G01N21/47 ,  G01N21/17

Abstract: Provided is an interferometer for inspecting a test sample. The interferometer includes: a light source for providing a light beam; a beam splitting element, splitting the light beam into first and second incident light, wherein the first incident light is reflected by the test sample into first reflection light; a reflecting element, reflecting the second incident light into second reflection light; an optical detection element, receiving the first and the second reflection light into an interference signal; and a signal processing module, coupled to the optical detection element, for performing spatial differential calculation on the interference signal to generate a demodulation image of the test sample.