公开(公告)号：US20210195697A1

公开(公告)日：2021-06-24

申请号：US16791612

申请日：2020-02-14

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Li-Wei YAO ,  Hsiao-Fen WEI ,  Yu-Ching LIN ,  Yi-Rong LIN ,  Kai-Ming CHANG ,  Yen-Shu LEE

IPC: H05B3/86 ,  H05B3/18

Abstract: A thin film heater includes a heat conductive layer, a heat insulation layer and a heat generation layer. The heat generation layer is disposed between the heat conductive layer and the heat insulation layer. The thermal conductivity of the heat conductive layer is greater than or equal to three times the thermal conductivity of the heat insulation layer.