公开(公告)号：US20230375428A1

公开(公告)日：2023-11-23

申请号：US18030430

申请日：2020-10-14

Applicant: INFICON AG

Inventor： Bernhard ANDREAUS ,  Rolf ENDERES ,  Christian BERG ,  Martin WÜEST

IPC: G01L27/00

CPC classification number: G01L27/002

Abstract: Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1′ with a first pressure measurement range and a second pressure sensor 1″ with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for earring out the method and to a computer program product.

公开(公告)号：US20230366766A1

公开(公告)日：2023-11-16

申请号：US18030438

申请日：2020-10-14

Applicant: INFICON AG

Inventor： Christian BERG ,  Rolf ENDERES ,  Martin WÜEST ,  Bernhard ANDREAUS

IPC: G01L21/34 ,  G01L21/32 ,  G01L27/00 ,  G01L9/00

CPC classification number: G01L21/34 ,  G01L21/32 ,  G01L27/005 ,  G01L9/0075

Abstract: A method for operating a group of pressure sensors is provided. First and second pressure sensors respectively have first and second pressure measurement ranges, and are arranged to measure the pressure in a common measurement volume, and have measurement ranges that overlap in a range. The method comprises: aa) reading out first and second measurement signals respectively from the first and second pressure sensors substantially simultaneously while the pressure in the common measurement volume is in the overlapping range; bb) stipulating the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in bb), and as a function of the second measurement signal.