-
1.发明公开公开(公告)号：US20240196508A1
公开(公告)日：2024-06-13
申请号：US18285201
申请日：2022-03-21
Applicant: INFICON AG
Inventor： Bernhard ANDREAUS , Astrid WALDNER
CPC classification number: H05H1/2406 , G01L11/02 , G01N21/67
Abstract: A vacuum feedthrough (10) which is constructed in radial layers comprises the following elements (from inwards to outwards): —a lens element (11), —a first ring (12) made of glass, —a first hollow cylinder (13) made of a first dielectric material, —a first electrically conductive layer (18), —a second hollow cylinder (14) made of glass, —a third hollow cylinder (15) made of ceramic, —a second ring made of glass (16), and—a frame (17) made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.
-
公开(公告)号：US20240177979A1
公开(公告)日：2024-05-30
申请号：US18285042
申请日：2022-03-21
Applicant: INFICON AG
Inventor： Astrid WALDNER , Bernhard ANDREAUS , Urs WÄLCHLI , Stefan KAISER
CPC classification number: H01J37/32981 , H01J37/32018 , H01J37/32211 , H01J37/3244 , H01J37/32825 , H01J37/32972 , H01J37/3447
Abstract: The present invention relates to a device for plasma generation in a wide pressure range. The device comprises a first plasma source (1) in a first discharge chamber (2) in order to generate a first plasma in a low-pressure range, a second plasma source (3) in a second discharge chamber (4) in order to generate a second plasma in a high-pressure range, a first coupling element (5) for coupling the device to a system, in order to guide gas out of the system, and a second coupling element (6) for coupling the device to an optical sensor (12). The first discharge chamber (2) has a first optical connection with at least one optical lens (7, 8) to the second coupling element (6) and the second discharge chamber (4) has a second optical connection with at least one optical lens (8) to the second coupling element (6). This invention further relates to a system for optical gas analysis or gas detection and corresponding methods for plasma generation and for operating the system.
-
公开(公告)号：US20240194465A1
公开(公告)日：2024-06-13
申请号：US18431091
申请日：2024-02-02
Applicant: INFICON AG
Inventor： Urs WÄLCHLI , Stefan KAISER , Bernhard ANDREAUS , Martin WÜEST , Astrid WALDNER , Michael TREFZER
Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.
-
Patent Agency Ranking
公开(公告)号：US20230375428A1
公开(公告)日：2023-11-23
申请号：US18030430
申请日：2020-10-14
Applicant: INFICON AG
Inventor： Bernhard ANDREAUS , Rolf ENDERES , Christian BERG , Martin WÜEST
IPC: G01L27/00
CPC classification number: G01L27/002
Abstract: Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1′ with a first pressure measurement range and a second pressure sensor 1″ with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for earring out the method and to a computer program product.
-
公开(公告)号：US20230366766A1
公开(公告)日：2023-11-16
申请号：US18030438
申请日：2020-10-14
Applicant: INFICON AG
Inventor： Christian BERG , Rolf ENDERES , Martin WÜEST , Bernhard ANDREAUS
CPC classification number: G01L21/34 , G01L21/32 , G01L27/005 , G01L9/0075
Abstract: A method for operating a group of pressure sensors is provided. First and second pressure sensors respectively have first and second pressure measurement ranges, and are arranged to measure the pressure in a common measurement volume, and have measurement ranges that overlap in a range. The method comprises: aa) reading out first and second measurement signals respectively from the first and second pressure sensors substantially simultaneously while the pressure in the common measurement volume is in the overlapping range; bb) stipulating the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in bb), and as a function of the second measurement signal.
-
公开(公告)号：US20220334016A1
公开(公告)日：2022-10-20
申请号：US17762019
申请日：2019-09-20
Applicant: INFICON AG
Inventor： Carsten STRIETZEL , Urs WÄLCHLI , Stefan KAISER , Christian RIESCH , Bernhard ANDREAUS , Mario WEDER
IPC: G01L21/34
Abstract: The invention relates to a method 100 for determining a pressure in a vacuum system, wherein the method comprises the steps of: a) generating 101 a plasma in a sample chamber which is fluid-dynamically connected to the vacuum system and which is in electrical contact with a first electrode and a second electrode; b) measuring 102 a current intensity of an electrical current flowing through the plasma between the first electrode and the second electrode; c) measuring 103 a first radiation intensity of electromagnetic radiation of a first wavelength range which is emitted from the plasma, wherein the first wavelength range contains at least a first emission line of a first plasma species of a first chemical element; d) measuring 104 a second radiation intensity of electromagnetic radiation of a second wavelength range which is emitted from the plasma, wherein the second wavelength range contains a second emission line of the first plasma species of the first chemical element or of a second plasma species of the first chemical element, and wherein the second emission line is outside the first wavelength range; and e) determining 105 the pressure in the vacuum system as a function of the measured current intensity, the measured first radiation intensity, and the measured second radiation intensity. Further, the invention relates to a vacuum pressure sensor.
-
公开(公告)号：US20250046589A1
公开(公告)日：2025-02-06
申请号：US18926803
申请日：2024-10-25
Applicant: INFICON AG
Inventor： Urs WÄLCHLI , Stefan KAISER , Bernhard ANDREAUS , Martin WÜEST , Astrid WALDNER , Michael TREFZER
Abstract: A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.
-
公开(公告)号：US20220341802A1
公开(公告)日：2022-10-27
申请号：US17761996
申请日：2019-09-20
Applicant: INFICON AG
Inventor： Stefan KAISER , Bernhard ANDREAUS
Abstract: Vacuum-tight electrical feedthrough 10, comprising an electrically insulating insulator element 2 having a through-opening 23, having a first boundary surface 21 adjacent to the through-opening, and having a second boundary surface 22 also adjacent to the through-opening and opposite to the first boundary surface, and an electrically conductive conductor element 1 which extends through the through-opening 23 and which is connected to the insulator element 2 in a vacuum-tight manner along a circumferential line of the conductor element 1, wherein the insulator element 2 is transmissive to electromagnetic radiation 25 in an optical wavelength range, and
wherein the first boundary surface 21 and/or the second 22 boundary surface is formed as a curved surface, in particular as a convex or concave surface.
The invention further relates to a vacuum pressure sensor having the vacuum-tight electrical feedthrough and a method for measuring a radiation intensity of electromagnetic radiation.
-
-
-
-
-
-
-
Search Results
8
records
(took 0.013 seconds)
