公开(公告)号：US20140265098A1

公开(公告)日：2014-09-18

申请号：US13833616

申请日：2013-03-15

Applicant: INFINEON TECHNOLOGIES AG

Inventor： Christian Himmelsbach ,  Joachim Hirschler ,  Helmut Brunner

IPC: B23Q7/00

CPC classification number: B23Q7/005 ,  H01L21/68742

Abstract: Lift pins and devices having lift pins are provided. According to an aspect, a lift pin may have a tapered distal portion. According to another aspect, a lift pin may have two portions threadedly engaged with each other. According to yet another aspect, a lift pin may be mounted to a lifting plate with slackness.

Abstract translation: 提供具有升降销的提升销和装置。 根据一方面，提升销可以具有锥形远端部分。 根据另一方面，提升销可以具有彼此螺纹接合的两个部分。 根据另一方面，提升销可以以松弛的方式安装到提升板上。

公开(公告)号：US10195704B2

公开(公告)日：2019-02-05

申请号：US13833616

申请日：2013-03-15

Applicant: Infineon Technologies AG

Inventor： Christian Himmelsbach ,  Joachim Hirschler ,  Helmut Brunner

IPC: B23Q7/00 ,  H01L21/687

Abstract: Lift pins and devices having lift pins are provided. According to an aspect, a lift pin may have a tapered distal portion. According to another aspect, a lift pin may have two portions threadedly engaged with each other. According to yet another aspect, a lift pin may be mounted to a lifting plate with slackness.