公开(公告)号：US20240248353A1

公开(公告)日：2024-07-25

申请号：US18560676

申请日：2021-12-17

申请人： INFOVISION OPTOELECTRONICS (KUNSHAN) CO., LTD. ,  PEKING UNIVERSITY SHENZHEN GRADUATE SCHOOL

发明人： SHENGDONG ZHANG ,  XIAOLIANG ZHOU ,  CONGWEI LIAO ,  QINGPING LIN ,  HUAN YANG ,  ZHONGFEI ZOU ,  TE-CHEN CHUNG

IPC分类号： G02F1/136 ,  G02F1/1343 ,  G02F1/1362 ,  G02F1/1368 ,  H01L27/12

CPC分类号： G02F1/13606 ,  G02F1/13439 ,  G02F1/136295 ,  G02F1/1368 ,  H01L27/124 ,  H01L27/1288

摘要： An array substrate and a manufacturing method therefor, and a display panel are provided. The manufacturing method includes: forming a scan line and a gate on a substrate; forming a first insulating layer covering the scan line and the gate on the substrate; forming a metal oxide semiconductor layer above the first insulating layer, the metal oxide semiconductor layer including a source, a drain and an active layer; coating an upper surface of the metal oxide semiconductor layer with a photosensitive material layer; photoetching the photosensitive material layer from the back side of the substrate by using a first metal layer as a mask to form a channel protection layer; performing conductorization treatment on the metal oxide semiconductor layer to enable the source and the drain to be conductive; forming a data line above the first insulating layer; and forming a pixel electrode above the first insulating layer.