公开(公告)号：US20150338718A1

公开(公告)日：2015-11-26

申请号：US14690341

申请日：2015-04-17

Applicant: INTEL CORPORATION

Inventor： Chong ZHANG ,  Aleksandar Aleksov ,  Islam A. Salama ,  Tiansi Wang ,  Aravinda Kar

IPC: G02F1/33

CPC classification number: G02F1/33 ,  G02F1/113 ,  G02F1/332

Abstract: An acousto-optic deflector with multiple acoustic transducers is described that is suitable for use in substrate processing. In one example a method includes transmitting an optic beam through an acousto-optic deflector, applying an acoustic signal with a phase delay across multiple transducers of the acousto-optic deflector to deflect the beam along a first axis by the acousto-optic deflector, and directing the deflected beam onto a workpiece.

Abstract translation: 描述了具有多个声换能器的声光偏转器，其适用于基板处理。 在一个示例中，一种方法包括通过声光偏转器传输光束，在声光偏转器的多个换能器上施加具有相位延迟的声信号，以通过声光偏转器沿着第一轴偏转光束;以及 将偏转的光束引导到工件上。