公开(公告)号：US10083813B2

公开(公告)日：2018-09-25

申请号：US15461829

申请日：2017-03-17

Applicant: INTEL CORPORATION

Inventor： Masaki Kurokawa ,  Takamasa Sato ,  Shinichi Kojima ,  Akio Yamada

IPC: H01J3/14 ,  H01J37/147 ,  H01J37/317 ,  H01J37/24

CPC classification number: H01J37/147 ,  H01J37/241 ,  H01J37/3177 ,  H01J2237/141 ,  H01J2237/1504 ,  H01J2237/152 ,  H01J2237/1526 ,  H01J2237/20285

Abstract: A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.

公开(公告)号：US10049854B2

公开(公告)日：2018-08-14

申请号：US15335448

申请日：2016-10-27

Applicant: INTEL CORPORATION

Inventor： Tomohiko Abe ,  Shinichi Kojima

IPC: H01J37/14 ,  H01J37/317 ,  H01J37/141

Abstract: Provided is a charged particle beam lens apparatus having a small size and high resolution, and a charged particle beam column and a charged particle beam exposure apparatus.A charged particle beam lens apparatus includes a lens unit positioned around a through hole through which a charged particle beam travels, where the lens unit is configured to converge or diffuse the charged particle beam, and a supporting unit surrounding the lens unit. Here, at least one of an outer peripheral portion of the lens unit that is in contact with the supporting unit and an inner peripheral portion of the supporting unit that is in contact with the lens unit includes a groove through which a coolant fluid flows along an outer periphery of the lens unit.In this way, the charged particle beam lens apparatus can achieve a small size and high resolution.