公开(公告)号：US20220102495A1

公开(公告)日：2022-03-31

申请号：US17032669

申请日：2020-09-25

Applicant: Intel Corporation

Inventor： Kirby Kurtis Maxey ,  Ashish Verma Penumatcha ,  Carl Hugo Naylor ,  Chelsey Jane Dorow ,  Kevin P. O'Brien ,  Shriram Shivaraman ,  Tanay Arun Gosavi ,  Uygar E. Avci

IPC: H01L29/08 ,  H01L29/24 ,  H01L29/78 ,  H01L29/66

Abstract: Disclosed herein are transistors including two-dimensional materials, as well as related methods and devices. In some embodiments, a transistor may include a first two-dimensional channel material and a second two-dimensional source/drain (S/D) material in a source/drain (S/D), and the first two-dimensional material and the second two-dimensional material may have different compositions or thicknesses. In some embodiments, a transistor may include a first two-dimensional material in a channel and a second two-dimensional material in a source/drain (S/D), wherein the first two-dimensional material is a single-crystal material, and the second two-dimensional material is a single-crystal material.

公开(公告)号：US20220102499A1

公开(公告)日：2022-03-31

申请号：US17032989

申请日：2020-09-25

Applicant: INTEL CORPORATION

Inventor： Carl Hugo Naylor ,  Kevin P. O'Brien ,  Chelsey Jane Dorow ,  Kirby Kurtis Maxey ,  Tanay Arun Gosavi ,  Ashish Verma Penumatcha ,  Urusa Shahriar Alaan ,  Uygar E. Avci

IPC: H01L29/10 ,  H01L27/088 ,  H01L29/08 ,  H01L29/24

Abstract: Disclosed herein are transistors including two-dimensional materials, as well as related methods and devices. In some embodiments, a transistor may include a first two-dimensional channel material and a second two-dimensional source/drain (S/D) material in a source/drain (S/D), and the first two-dimensional material and the second two-dimensional material may have different compositions or thicknesses. In some embodiments, a transistor may include a first two-dimensional material in a channel and a second two-dimensional material in a source/drain (S/D), wherein the first two-dimensional material is a single-crystal material, and the second two-dimensional material is a single-crystal material.