公开(公告)号：US20210151659A1

公开(公告)日：2021-05-20

申请号：US16684404

申请日：2019-11-14

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Vivekananda Adiga ,  David L. Rath ,  Martin O. Sandberg

IPC: H01L39/24 ,  H01L39/12 ,  H01L39/02 ,  H01L39/22

Abstract: A method of making a Josephson junction in a superconducting qubit includes providing a substrate having a convex structure with a first face and a second face meeting at an edge; depositing a first layer of superconducting material on the first face; oxidizing the first layer to form a layer of oxide material on a surface of the first layer; and depositing a second layer of the superconducting material on the second face. A portion of the second layer is in contact with a portion of the layer of oxide material at or in the vicinity of the edge such that the portion of the layer of oxide material is sandwiched between a portion of the first layer and the portion of the second layer to define a Josephson junction at or in the vicinity of the edge.

公开(公告)号：US11094873B2

公开(公告)日：2021-08-17

申请号：US16684404

申请日：2019-11-14

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Vivekananda Adiga ,  David L. Rath ,  Martin O. Sandberg

IPC: H01L39/24 ,  H01L39/22 ,  H01L39/02 ,  H01L39/12

Abstract: A method of making a Josephson junction in a superconducting qubit includes providing a substrate having a convex structure with a first face and a second face meeting at an edge; depositing a first layer of superconducting material on the first face; oxidizing the first layer to form a layer of oxide material on a surface of the first layer; and depositing a second layer of the superconducting material on the second face. A portion of the second layer is in contact with a portion of the layer of oxide material at or in the vicinity of the edge such that the portion of the layer of oxide material is sandwiched between a portion of the first layer and the portion of the second layer to define a Josephson junction at or in the vicinity of the edge.