公开(公告)号：US20160370311A1

公开(公告)日：2016-12-22

申请号：US14742917

申请日：2015-06-18

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Lyndon R. LOGAN ,  Edward J. NOWAK ,  Robert R. ROBISON ,  Yan HE

IPC: G01N27/22 ,  H01L23/64 ,  H01L29/06 ,  H01L21/66

CPC classification number: H01L22/34 ,  H01L22/14

Abstract: Approaches for characterizing a shallow trench isolation (STI) divot depth are provided. The approach includes measuring a first capacitance at a first region of a substrate where at least one first gate line crosses over a boundary junction between a STI region and an active region. The approach also includes measuring a second capacitance at a second region of the substrate where at least one second gate line crosses over the active region. The approach further includes calculating a capacitance associated with a divot at the first region based on a difference between the first capacitance at the first region and the second capacitance at the second region.

Abstract translation: 提供了表征浅沟槽隔离（STI）深度的方法。 该方法包括测量在衬底的第一区域处的第一电容，其中至少一个第一栅极线穿过STI区域和有源区域之间的边界结。 该方法还包括在衬底的第二区域处测量第二电容，其中至少一个第二栅极线与有源区交叉。 该方法还包括基于第一区域的第一电容和第二区域的第二电容之间的差来计算与第一区域处的纹路相关联的电容。