Gas sensing method with chemical and thermal conductivity sensing

    公开(公告)号:US10935509B2

    公开(公告)日:2021-03-02

    申请号:US16786361

    申请日:2020-02-10

    申请人: INVENSENSE, INC.

    摘要: The present invention relates to methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.

    GAS SENSING METHOD WITH CHEMICAL AND THERMAL CONDUCTIVITY SENSING

    公开(公告)号:US20200173946A1

    公开(公告)日:2020-06-04

    申请号:US16786361

    申请日:2020-02-10

    申请人: INVENSENSE, INC.

    摘要: The present invention relates to methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.

    Gas sensing device with chemical and thermal conductivity sensing

    公开(公告)号:US10598621B2

    公开(公告)日:2020-03-24

    申请号:US15484864

    申请日:2017-04-11

    申请人: INVENSENSE, INC.

    摘要: The present invention relates to systems and methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.

    GAS SENSING METHOD AND DEVICE
    4.
    发明申请

    公开(公告)号:US20180292338A1

    公开(公告)日:2018-10-11

    申请号:US15484864

    申请日:2017-04-11

    申请人: INVENSENSE, INC.

    IPC分类号: G01N27/04 G01N33/00

    摘要: The present invention relates to systems and methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.