-
公开(公告)号:US20190198704A1
公开(公告)日:2019-06-27
申请号:US16331241
申请日:2017-09-12
发明人: Nicolò CARTIGLIA , Gian Franco DALLA BETTA , Lucio PANCHERI , Maurizio BOSCARDIN , Giovanni PATERNOSTER
IPC分类号: H01L31/118 , H01L31/028 , H01L31/0224
CPC分类号: H01L31/118 , H01L31/022408 , H01L31/028 , H01L31/115
摘要: Silicon Particle Detector, comprising an absorption region (10) capable of generating electrical charges in response to a particle passing therethrough, a first and a second electrode (20, 30) arranged on opposite sides of the absorption region (10), wherein the first electrode (20) is segmented into a plurality of pads (20a), and a plurality of multiplication layers (40) able to avalanche-multiply the electric charges generated in the absorption region (10), each of the multiplication layers (40) being arranged beneath a respective pad (20a) and interposed between it and the absorption region (10), each multiplication layer (40) is surrounded by a respective protection ring (50) formed by the material of the pad (20a). The protection ring (50) is laterally interposed between the multiplication layer (40) and the absorption region (10).