METHOD FOR CONCENTRATING OZONE GAS AND APPARATUS FOR CONCENTRATING OZONE GAS

    公开(公告)号:US20190126191A1

    公开(公告)日:2019-05-02

    申请号:US16092220

    申请日:2017-03-03

    Abstract: Provided is a method for concentrating ozone gas, including the steps of: allowing ozone gas to be adsorbed onto an adsorbent in a first adsorption vessel; reducing pressure in a concentration vessel in a state where the concentration vessel does not communicate with the first adsorption vessel; discharging part of gas in the first adsorption vessel; introducing first concentrated mixed gas in the concentration vessel by desorbing ozone gas in the first concentrated mixed gas and delivering the desorbed ozone gas into the concentration vessel; allowing ozone gas to be adsorbed onto an adsorbent in a second adsorption vessel; and introducing second concentrated mixed gas into the concentration vessel in a state where the concentration vessel into which the first concentrated mixed gas is introduced and the second adsorption vessel that houses an adsorbent. Also provided is an apparatus for concentrating ozone gas for implementing the method.

    METHOD AND APPARATUS FOR SUPPLYING MIXED GAS
    2.
    发明申请
    METHOD AND APPARATUS FOR SUPPLYING MIXED GAS 有权
    用于供应混合气体的方法和装置

    公开(公告)号:US20150020890A1

    公开(公告)日:2015-01-22

    申请号:US14511214

    申请日:2014-10-10

    Abstract: A method and apparatus, for supplying high-pressure mixed gas of a low-vapor-pressure first gas as an active gas and a high-vapor-pressure second gas, are arranged to reduce an amount of the first gas discarded. The mixed gas in a high-pressure state is supplied from a mixing container to a use point. Upon reduction of pressure in the mixing container to a setpoint as a result of supply to the use point, a predetermined amount of the first gas is charged into a replenishment container connected to the mixing container by a replenishment line having a replenishment valve, and which is evacuated. As the second gas is charged into the replenishment container charged with the first gas, the replenishment valve is opened such that the first gas in the replenishment container is forced out by the second gas, thereby charging the mixing container with the mixed gas in the high-pressure condition.

    Abstract translation: 用于提供作为活性气体的低蒸气压第一气体和高蒸气压的第二气体的高压混合气体的方法和装置被布置成减少废弃的第一气体的量。 高压状态的混合气体从混合容器供给到使用点。 在将混合容器中的压力降低到作为使用点的供给量的设定点时,将预定量的第一气体通过具有补充阀的补充管线装入连接到混合容器的补充容器中,并且 被疏散。 随着第二气体被充入装有第一气体的补充容器中,补充阀打开,使得补充容器中的第一气体被第二气体强制排出,从而将混合容器与高混合气体充满 压力条件

    METHOD FOR CONCENTRATING OZONE GAS AND APPARATUS FOR CONCENTRATING OZONE GAS

    公开(公告)号:US20190111379A1

    公开(公告)日:2019-04-18

    申请号:US16092016

    申请日:2017-03-03

    Abstract: Provided is method for concentrating ozone gas the method including the steps of: allowing ozone gas to be adsorbed onto the adsorbent by introducing ozone gas-containing raw material mixed gas into an adsorption vessel (20) that houses an adsorbent for adsorbing ozone gas; reducing a pressure in a concentration vessel (30) in a state where the concentration vessel (30) does not communicate with the adsorption vessel (20), the concentration vessel (30) being configured to be connected to the adsorption vessel (20) so as to be interswitchable between a state where the concentration vessel (30) communicates with the adsorption vessel (20) and a state where the concentration vessel does not communicate with the adsorption vessel (20); and introducing concentrated mixed gas including ozone gas with a higher ozone gas concentration than the ozone gas concentration in the raw material mixed gas into the concentration vessel (30) by desorbing the ozone gas adsorbed onto the adsorbent using a pressure difference between the internal pressure of the concentration vessel (30) and an internal pressure of the adsorption vessel (20) in a state where the concentration vessel (30) having a reduced internal pressure communicates with the adsorption vessel (20) that houses the adsorbent onto which the ozone gas is adsorbed, and delivering the desorbed ozone gas into the concentration vessel (30). Also provided is an apparatus (1) for concentrating ozone gas for implementing the method.

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