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公开(公告)号：US20100242592A1
公开(公告)日：2010-09-30
申请号：US12739520
申请日：2008-10-24
申请人： Ibraheem Haneef , Howard P. Hodson , Robert Miller , Florin Udrea
发明人： Ibraheem Haneef , Howard P. Hodson , Robert Miller , Florin Udrea
CPC分类号： G01F1/6845 , G01F1/7084 , G01N3/24 , G01N2203/0226 , G01N2203/0623
摘要： This invention relates to hot film shear stress sensors and their fabrication. We describe a hot film shear stress sensor comprising a silicon substrate supporting a membrane having a cavity underneath, said membrane bearing a film of metal and having electrical contacts for heating said film, and wherein said membrane comprises a silicon oxide membrane, where in said metal comprises aluminium or tungsten, and wherein said membrane has a protective layer of a silicon-based material over said film of metal. In preferred embodiments the sensor is fabricated by a CMOS process and the metal comprises aluminium or tungsten.
摘要翻译： 本发明涉及热膜剪切应力传感器及其制造。 我们描述了一种热膜剪切应力传感器，其包括支撑具有下面空腔的膜的硅衬底，所述膜承载金属膜并具有用于加热所述膜的电触点，并且其中所述膜包括氧化硅膜，其中在所述金属 包括铝或钨，并且其中所述膜在所述金属膜上具有硅基材料的保护层。 在优选实施例中，传感器通过CMOS工艺制造，并且金属包括铝或钨。
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公开(公告)号：US09080907B2
公开(公告)日：2015-07-14
申请号：US12739520
申请日：2008-10-24
申请人： Ibraheem Haneef , Howard P. Hodson , Robert Miller , Florin Udrea
发明人： Ibraheem Haneef , Howard P. Hodson , Robert Miller , Florin Udrea
CPC分类号： G01F1/6845 , G01F1/7084 , G01N3/24 , G01N2203/0226 , G01N2203/0623
摘要： This invention relates to hot film shear stress sensors and their fabrication. We describe a hot film shear stress sensor comprising a silicon substrate supporting a membrane having a cavity underneath, said membrane bearing a film of metal and having electrical contacts for heating said film, and wherein said membrane comprises a silicon oxide membrane, where in said metal comprises aluminium or tungsten, and wherein said membrane has a protective layer of a silicon-based material over said film of metal. In preferred embodiments the sensor is fabricated by a CMOS process and the metal comprises aluminium or tungsten.
摘要翻译： 本发明涉及热膜剪切应力传感器及其制造。 我们描述了一种热膜剪切应力传感器，其包括支撑具有下面空腔的膜的硅衬底，所述膜承载金属膜并具有用于加热所述膜的电触点，并且其中所述膜包括氧化硅膜，其中在所述金属 包括铝或钨，并且其中所述膜在所述金属膜上具有硅基材料的保护层。 在优选实施例中，传感器通过CMOS工艺制造，并且金属包括铝或钨。
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公开(公告)号：US20080138197A1
公开(公告)日：2008-06-12
申请号：US11984976
申请日：2007-11-26
申请人： Matthew J. Green , Neil W. Harvey , Edward M. J. Naylor , Cecilia Ortiz-Duenas , Howard P. Hodson , Robert J. Miller
发明人： Matthew J. Green , Neil W. Harvey , Edward M. J. Naylor , Cecilia Ortiz-Duenas , Howard P. Hodson , Robert J. Miller
IPC分类号： F01D25/24
CPC分类号： F01D5/145 , F01D5/143 , F01D9/023 , F05D2240/126 , F05D2250/70 , Y02T50/671 , Y02T50/673
摘要： A transition duct for a gas turbine engine typically contains one or more non-turning fairings. These fairings disturb the air flow through the duct, leading to flow separation and aerodynamic inefficiency. The invention proposes non-axisymmetric perturbations in the duct end walls to minimise these undesirable aerodynamic effects. This permits the construction of shorter and lighter transition ducts, with more pronounced curvature.
摘要翻译： 用于燃气涡轮发动机的过渡管通常包含一个或多个非转向整流罩。 这些整流罩扰乱通过管道的空气流动，导致流动分离和空气动力学效率低下。 本发明提出了管道端壁中的非轴对称扰动，以最小化这些不期望的空气动力学效应。 这允许构造更短和更轻的过渡管道，具有更显着的曲率。
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