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公开(公告)号：US11674833B2
公开(公告)日：2023-06-13
申请号：US16709043
申请日：2019-12-10
Applicant: Sensirion AG
Inventor： Mark Hornung , Andreas Rüegg , Harry Figi , Lucas Huber
IPC: G01F1/7084 , G01F1/698 , G01K13/02
CPC classification number: G01F1/7084 , G01F1/698 , G01K13/02
Abstract: A thermal sensor comprises an active element (41), e.g., a heater or cooler, at least one temperature sensor (31), and processing circuitry (50). The processing circuitry causes a change of power supplied to the active element (41). It then determines, at a plurality of times, a thermal parameter based on an output signal of the temperature sensors and analyzes the transient behavior of the thermal parameter. Based on this analysis, the processing circuitry determines a contamination signal that is indicative of a contamination on a sensing surface of the thermal sensor. If the thermal sensor comprises a plurality of temperature sensors arranged in different sectors of the sensing surface, a multi-sector thermal signal can be derived from the outputs of the sensors, and determination of the contamination signal can be based on the multi-sector thermal signal.
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公开(公告)号：US20170030873A1
公开(公告)日：2017-02-02
申请号：US15303320
申请日：2015-04-13
Applicant: Siemens Aktiengesellschaft
Inventor： Udo GELLERT
CPC classification number: G01N30/66 , B01L3/5027 , B01L2300/0663 , B01L2300/1827 , G01F1/7084 , G01N27/18 , G01N27/185 , G01N30/62 , G01N2030/025 , G01N2030/621 , G01N2030/625
Abstract: A thermal conductivity detector which includes a measurement channel, an electrically heatable heating filament extending longitudinally along the center of the measurement channel so that a fluid passing through the measurement channel flows around the filament, an evaluator that detects electrical resistance changes of the heating filament and provide an output representative of the presence and amount of various fluid components passing the heating filament, and a bypass channel for bypassing the measurement channel, where the bypass channel has a lower fluidic resistance than the measurement channel and where, in order to improve the detection capability, the thermal conductivity detector further includes a flow sensor for measuring the flow of the fluid in the bypass channel and for providing an output indicative of the measured flow, and a correcting device for correcting the output of the evaluator using the output of the flow sensor.
Abstract translation: 一种热导率检测器，其包括测量通道，沿着测量通道的中心纵向延伸的电可加热加热丝，使得通过测量通道的流体围绕细丝流动;评估器，其检测加热丝的电阻变化;以及 提供代表通过加热丝的各种流体组分的存在和量的输出，以及用于绕过测量通道的旁路通道，其中旁路通道具有比测量通道更低的流体阻力，并且为了改进检测 热导率检测器还包括用于测量旁路通道中的流体流量并用于提供指示测量流量的输出的流量传感器，以及校正装置，用于使用该流量的输出来校正评估器的输出 传感器。
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公开(公告)号：US20150354345A1
公开(公告)日：2015-12-10
申请号：US14730189
申请日：2015-06-03
Applicant: Schlumberger Technology Corporation
Inventor： John Meier , Elizabeth Smythe , Matthew T. Sullivan , Shunsuke Fukagawa , Christopher Harrison
CPC classification number: G01F1/7086 , E21B49/088 , E21B49/10 , G01F1/7044 , G01F1/7084 , G01F5/00 , G01F25/0015
Abstract: Methods and systems for determining the presence and/or rate of a flow of a fluid sample include transmitting light through the fluid sample are disclosed. The methods comprise, applying a series of thermal pulses to the fluid sample, the series comprises a time interval between each thermal pulse, detecting transmitted light using a light detector; and determining at least one of (a) whether or not the fluid is flowing and (b) a flow rate of the fluid, based on an intensity of the transmitted light corresponding to at least one time interval.
Abstract translation: 用于确定流体样品的流动的存在和/或速率的方法和系统包括透射通过流体样品的光。 该方法包括：将一系列热脉冲施加到流体样品，该系列包括每个热脉冲之间的时间间隔，使用光检测器检测透射光; 并且基于与至少一个时间间隔对应的所述透射光的强度来确定流体是否流动和（b）所述流体的流量中的至少一个。
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公开(公告)号：US09080907B2
公开(公告)日：2015-07-14
申请号：US12739520
申请日：2008-10-24
Applicant: Ibraheem Haneef , Howard P. Hodson , Robert Miller , Florin Udrea
Inventor： Ibraheem Haneef , Howard P. Hodson , Robert Miller , Florin Udrea
CPC classification number: G01F1/6845 , G01F1/7084 , G01N3/24 , G01N2203/0226 , G01N2203/0623
Abstract: This invention relates to hot film shear stress sensors and their fabrication. We describe a hot film shear stress sensor comprising a silicon substrate supporting a membrane having a cavity underneath, said membrane bearing a film of metal and having electrical contacts for heating said film, and wherein said membrane comprises a silicon oxide membrane, where in said metal comprises aluminium or tungsten, and wherein said membrane has a protective layer of a silicon-based material over said film of metal. In preferred embodiments the sensor is fabricated by a CMOS process and the metal comprises aluminium or tungsten.
Abstract translation: 本发明涉及热膜剪切应力传感器及其制造。 我们描述了一种热膜剪切应力传感器，其包括支撑具有下面空腔的膜的硅衬底，所述膜承载金属膜并具有用于加热所述膜的电触点，并且其中所述膜包括氧化硅膜，其中在所述金属 包括铝或钨，并且其中所述膜在所述金属膜上具有硅基材料的保护层。 在优选实施例中，传感器通过CMOS工艺制造，并且金属包括铝或钨。
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5.发明申请公开(公告)号：US20130276549A1
公开(公告)日：2013-10-24
申请号：US13919364
申请日：2013-06-17
Applicant: Paal Even Gaarder
Inventor： Paal Even Gaarder
IPC: G01F1/708
CPC classification number: G01F1/7084 , G01F1/68 , G01F1/6847 , G01F1/6884 , G01F17/00 , G01F22/00 , G01F23/22
Abstract: The present disclosure relates to a method and an apparatus for measuring a flow rate through a vessel, such as a conduit or pipeline. The method comprises providing a reference parameter, measuring a first parameter at a first position at the vessel and determining a difference between the first parameter and the reference parameter. The flow rate through the vessel is determined based on the difference between the first parameter and the reference parameter.
Abstract translation: 本公开涉及一种用于测量通过诸如导管或管道的容器的流量的方法和装置。 所述方法包括提供参考参数，在所述容器的第一位置处测量第一参数并确定所述第一参数与所述参考参数之间的差异。 基于第一参数和参考参数之间的差来确定通过容器的流量。
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Patent Agency Ranking
公开(公告)号：US20120216629A1
公开(公告)日：2012-08-30
申请号：US13035639
申请日：2011-02-25
Applicant: Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
Inventor： Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
IPC: G01F1/708
CPC classification number: G01F1/7084 , G01F1/72
Abstract: An apparatus comprising a micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon flow sensor, a flow channel package, and a driving circuitry, which operates in a working principle of thermal time-of-flight (TOF) to measure gas or liquid flow speed, is disclosed in the present invention. The micromachining technique for fabricating this MEMS time-of-flight silicon thermal flow sensor can greatly reduce the sensor fabrication cost by batch production. This microfabrication process for silicon time-of-flight thermal flow sensors provides merits of small feature size, low power consumption, and high accuracy compared to conventional manufacturing methods. Thermal time-of-flight technology in principle can provide accurate flow speed measurements for gases regardless of its gas compositions. In addition, the present invention further discloses the package design and driving circuitry which is utilized by the correlated working principle.
Abstract translation: 一种包括微加工（也称为MEMS，微机电系统）硅流量传感器，流动通道封装和驱动电路的装置，其以热时间飞行（TOF）的工作原理工作以测量气体或液体流量 速度，在本发明中公开。 用于制造这种MEMS飞行时间硅热流量传感器的微加工技术可以通过批量生产大大降低传感器制造成本。 与传统的制造方法相比，这种用于硅时间飞行热流传感器的微加工工艺具有小特征尺寸，低功耗和高精度的优点。 原理上，热时间飞行技术可以为气体提供准确的流速测量，无论其气体成分如何。 此外，本发明还公开了通过相关工作原理利用的封装设计和驱动电路。
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公开(公告)号：US08109155B2
公开(公告)日：2012-02-07
申请号：US12390498
申请日：2009-02-23
Applicant: Akira Otsuka
Inventor： Akira Otsuka
CPC classification number: E21B47/1005 , E21B2049/085 , G01F1/6986 , G01F1/7044 , G01F1/7084 , Y10T137/6416
Abstract: Example methods and apparatus to measure fluid flow rates are disclosed. A disclosed example apparatus includes a circulator to selectively circulate a fluid in a flowline, a generator thermally coupled to the flowline at a first location and controllable to form a heat wave in the fluid, a sensor thermally coupled to the flowline at a second location to measure a first value representative of the heat wave, a phase detector to determine a second value representative of a wavelength of the heat wave based on the first value, a frequency adjuster to control the generator to form the heat wave in the fluid at a first frequency, the first frequency selected so that the second value is substantially equal to a distance between the first and second locations, and a flow rate determiner to determine a flow rate of the fluid based on the first frequency.
Abstract translation: 公开了用于测量流体流速的示例性方法和装置。 所公开的示例性设备包括：循环器，用于选择性地循环流线中的流体;发电机，其在第一位置处热耦合到流线，并可控制以在流体中形成热浪;传感器在第二位置热耦合到流线， 测量代表热波的第一值;相位检测器，用于基于第一值确定代表热波的波长的第二值;频率调节器，用于控制发生器，以在第一值处形成流体中的热波; 频率，所选择的第一频率使得第二值基本上等于第一和第二位置之间的距离;以及流量确定器，用于基于第一频率确定流体的流量。
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公开(公告)号：US20110087447A1
公开(公告)日：2011-04-14
申请号：US12935738
申请日：2009-04-02
Applicant: Arno Willem Frederik Volker , Leon Ferdinand Gerard Geers , Huibert Blokland , Theodoor Peter Martijn Hunter
Inventor： Arno Willem Frederik Volker , Leon Ferdinand Gerard Geers , Huibert Blokland , Theodoor Peter Martijn Hunter
IPC: G01F1/688
CPC classification number: G01F1/688 , G01F1/7044 , G01F1/708 , G01F1/7082 , G01F1/7084
Abstract: Fluid flows through a conduit. To measure flow speed the fluid is heated at a heating location in the conduit with a time-dependent heating strength. A speed of sound in fluid flowing in the conduit is measured at a plurality of sensing locations downstream from said heating location. The flow speed of the fluid is determined from a delay with which the time dependence is detected in the sound speeds measured at said sensing locations. In an embodiment a frequency of the variation of heating strength that is used to determine the flow speed is selected automatically dependent on the flow speed and/or other circumstances.
Abstract translation: 流体流过管道。 为了测量流速，流体在管道中的加热位置被加热，具有时间依赖的加热强度。 在所述加热位置下游的多个感测位置处测量在导管中流动的流体中的声速。 从在所述检测位置处测量的声速中检测到时间依赖性的延迟来确定流体的流速。 在一个实施例中，用于确定流速的加热强度变化的频率根据流速和/或其他情况自动选择。
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9.发明授权公开(公告)号：US07856874B2
公开(公告)日：2010-12-28
申请号：US12092387
申请日：2006-10-26
Applicant: Nikolay Tsypko
Inventor： Nikolay Tsypko
IPC: G01F1/68
CPC classification number: G01F1/7044 , G01F1/6847 , G01F1/6888 , G01F1/7084 , G01N9/32
Abstract: An apparatus for measuring a fluid microflow velocity within a capillary conduit, comprises: a) at least one thermoelectric cooler having a heating and a cooling surface, said heating surface being suitable for heating a fluid flowing over it and said cooling surface being suitable for cooling said fluid; and b) a capillary conduit through which said fluid flows, said capillary conduit passing through said at least one thermoelectric cooler in heat-exchanging positioned relationship with its heating and cooling surfaces.
Abstract translation: 一种用于测量毛细管道内的流体微流速度的装置，包括：a）至少一个具有加热和冷却表面的热电冷却器，所述加热表面适于加热流过其上的流体，所述冷却表面适于冷却 说流体 以及b）所述流体流过的毛细管道，所述毛细管通过所述至少一个热电冷却器，与其加热和冷却表面热定位关系。
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公开(公告)号：US20100212889A1
公开(公告)日：2010-08-26
申请号：US12390498
申请日：2009-02-23
Applicant: Akira Otsuka
Inventor： Akira Otsuka
CPC classification number: E21B47/1005 , E21B2049/085 , G01F1/6986 , G01F1/7044 , G01F1/7084 , Y10T137/6416
Abstract: Example methods and apparatus to measure fluid flow rates are disclosed. A disclosed example apparatus includes a circulator to selectively circulate a fluid in a flowline, a generator thermally coupled to the flowline at a first location and controllable to form a heat wave in the fluid, a sensor thermally coupled to the flowline at a second location to measure a first value representative of the heat wave, a phase detector to determine a second value representative of a wavelength of the heat wave based on the first value, a frequency adjuster to control the generator to form the heat wave in the fluid at a first frequency, the first frequency selected so that the second value is substantially equal to a distance between the first and second locations, and a flow rate determiner to determine a flow rate of the fluid based on the first frequency.
Abstract translation: 公开了用于测量流体流速的示例性方法和装置。 所公开的示例性设备包括：循环器，用于选择性地循环流线中的流体;发电机，其在第一位置处热耦合到流线，并可控制以在流体中形成热浪;传感器在第二位置热耦合到流线， 测量代表热波的第一值;相位检测器，用于基于第一值确定代表热波的波长的第二值;频率调节器，用于控制发生器，以在第一值处形成流体中的热波; 频率，所选择的第一频率使得第二值基本上等于第一和第二位置之间的距离;以及流量确定器，用于基于第一频率确定流体的流量。
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