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    In-tool ESD events selective monitoring method and apparatus
    3.
    发明授权
    In-tool ESD events selective monitoring method and apparatus 有权

    公开(公告)号：US11307235B2

    公开(公告)日：2022-04-19

    申请号：US15267640

    申请日：2016-09-16

    申请人： Illinois Tool Works Inc.

    发明人： Lyle D. Nelsen ,  Steven B. Heymann ,  Mark E. Hogsett

    IPC分类号： G01R31/00 ,  H02H1/00 ,  G01R31/28 ,  G01R35/00

    摘要： An embodiment of the invention provides an apparatus for detecting electrostatic discharges (ESD) events, comprising: an ESD detector configured to determine at least one process window that will permit the ESD detector to detect an ESD event; at least one antenna coupled to said ESD detector; and said ESD detector calibrated for at least one discharge energy. Another embodiment of the invention provides: a method for detecting electrostatic discharges (ESD) events, comprising: determining at least one process window that will permit an ESD detector to detect an ESD event; and calibrating the ESD detector for at least one discharge energy.

    In-tool ESD Events Monitoring Method And Apparatus
    4.
    发明申请
    In-tool ESD Events Monitoring Method And Apparatus 有权
    工具ESD事件监控方法和装置

    公开(公告)号：US20140184253A1

    公开(公告)日：2014-07-03

    申请号：US14140860

    申请日：2013-12-26

    申请人： Illinois Tool Works Inc.

    发明人： Lyle D. Nelsen ,  Steven B. Heymann ,  Mark E. Hogsett

    IPC分类号： G01R31/00 ,  G01R35/00

    CPC分类号： G01R31/002 ,  G01R31/001 ,  G01R35/005

    摘要： In one embodiment of the invention, an apparatus for electrostatic discharges (ESD) events monitoring incorporating a charged device model event simulator (CDMES) unit comprises: at least one antenna positioned in a process area; an ESD detector coupled to said at least one antenna; said ESD detector wirelessly coupled to said CDMES unit; and said ESD detector calibrated for different discharge energies generated by said CDMES unit.

    摘要翻译： 在本发明的一个实施例中，一种结合有充电装置模型事件模拟器（CDMES）装置的静电放电（ESD）事件监测装置包括：位于处理区域中的至少一个天线; 耦合到所述至少一个天线的ESD检测器; 所述ESD检测器无线地耦合到所述CDMES单元; 并且所述ESD检测器针对由所述CDMES单元产生的不同放电能量进行校准。