公开(公告)号：US11328946B2

公开(公告)日：2022-05-10

申请号：US17327783

申请日：2021-05-24

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Jia-Jen Chang ,  Ming-Sheng Leu ,  Tai-Sheng Chen ,  Chin-Te Shih

IPC: H01L21/673 ,  B65G47/74 ,  C23C14/02 ,  C23C14/14 ,  C23C14/08 ,  C23C14/00 ,  C23C14/32 ,  H05F3/04

Abstract: A manufacturing method of the ESD protection device includes the following steps. A surface treatment is performed on the substrate. A link layer is formed on the substrate after the surface treatment, wherein a material of the link layer includes a metal material. A progressive layer is formed on the link layer, wherein a material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. A composite layer is formed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 to 1×108 Ω/sq.

公开(公告)号：US20210282253A1

公开(公告)日：2021-09-09

申请号：US17327783

申请日：2021-05-24

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Jia-Jen Chang ,  Ming-Sheng Leu ,  Tai-Sheng Chen ,  Chin-Te Shih

IPC: H05F3/04 ,  H01L21/673 ,  B65G47/74 ,  C23C14/02 ,  C23C14/14 ,  C23C14/08 ,  C23C14/00 ,  C23C14/32

Abstract: A manufacturing method of the ESD protection device includes the following steps. A surface treatment is performed on the substrate. A link layer is formed on the substrate after the surface treatment, wherein a material of the link layer includes a metal material. A progressive layer is formed on the link layer, wherein a material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. A composite layer is formed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 to 1×108 Ω/sq.

公开(公告)号：US11044798B2

公开(公告)日：2021-06-22

申请号：US16152425

申请日：2018-10-05

Applicant: Industrial Technology Research Institute

Inventor： Ding-Shiang Wang ,  Jia-Jen Chang ,  Ming-Sheng Leu ,  Tai-Sheng Chen ,  Chin-Te Shih

IPC: H05F3/04 ,  H01L21/673 ,  B65G47/74 ,  C23C14/02 ,  C23C14/14 ,  C23C14/08 ,  C23C14/00 ,  C23C14/32

Abstract: An ESD protection composite structure includes a link layer, a progressive layer, and a composite layer. The link layer is used for disposing the ESD protection composite structure on a substrate, wherein a material of the link layer includes a metal material. The progressive layer is disposed on the link layer, wherein the material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. The composite layer is disposed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 Ω/sq to 1×108 Ω/sq.