公开(公告)号：US10173407B2

公开(公告)日：2019-01-08

申请号：US15135403

申请日：2016-04-21

Applicant: Industrial Technology Research Institute

Inventor： Chen-Chu Tsai ,  Cheng-Yi Wang ,  Shi-Chang Chen ,  Tzu-Chun Lin

IPC: B32B37/10 ,  B32B37/00 ,  B32B43/00

Abstract: A device is for removing a first substrate from a second substrate or adhering the first substrate to the second substrate. The device includes a carrier, a flexible member and a supporting member. The carrier is for fixing the first substrate. The flexible member is for fixing the second substrate. The supporting member is connected to the carrier and the flexible member. The carrier and the flexible member are spaced a distance from each other. The carrier, the flexible member and the supporting member together define a first variable pressure chamber. The first variable pressure chamber has a first air hole.

公开(公告)号：US20170144422A1

公开(公告)日：2017-05-25

申请号：US15135403

申请日：2016-04-21

Applicant: Industrial Technology Research Institute

Inventor： Chen-Chu Tsai ,  Cheng-Yi Wang ,  Shi-Chang Chen ,  Tzu-Chun Lin

IPC: B32B37/10 ,  B32B43/00 ,  B32B37/00

CPC classification number: B32B37/1018 ,  B32B37/0046 ,  B32B43/006 ,  B32B2457/00

Abstract: A device is for removing a first substrate from a second substrate or adhering the first substrate to the second substrate. The device includes a carrier, a flexible member and a supporting member. The carrier is for fixing the first substrate. The flexible member is for fixing the second substrate. The supporting member is connected to the carrier and the flexible member. The carrier and the flexible member are spaced a distance from each other. The carrier, the flexible member and the supporting member together define a first variable pressure chamber. The first variable pressure chamber has a first air hole.