公开(公告)号：US20240060944A1

公开(公告)日：2024-02-22

申请号：US18452007

申请日：2023-08-18

Applicant: Infineon Technologies AG

Inventor： Alexandra Marina Roth ,  Matic Krivec ,  Alexander Zöpfl ,  Dominic Maier ,  Markus Meyer ,  Werner Breuer

IPC: G01N33/00 ,  G01N27/16

CPC classification number: G01N33/0022 ,  G01N33/0037 ,  G01N33/0039 ,  G01N33/0062 ,  G01N27/16

Abstract: A sensor chip includes a substrate and one or more chemo-resistive gas sensing elements attached to the substrate. Each gas sensing element provides a signal depending on one or more gases to be sensed. A catalytic gas filter arrangement includes one or more filter sections, each filter section including a cavity covered with at least one membrane. The at least one membrane is supported by a support structure and includes gas permeable pores. A surface defining the pores includes a catalytic material for degrading one or more of the gases. The gas filter arrangement is arranged so at least one of the chemo-resistive gas sensing elements is exposed to a filtered mixture of the gases in the cavity of one of the filter sections. The filtered mixture of gases is obtained by filtering the ambient mixture of the one or more gases with the one of the filter sections.