公开(公告)号：US20150090043A1

公开(公告)日：2015-04-02

申请号：US14497452

申请日：2014-09-26

Applicant: Infineon Technologies AG

Inventor： Guenther Ruhl ,  Max Christian Lemme ,  Alfons Dehe ,  Andreas Fischer ,  Frank Niklaus ,  Anderson Smith

IPC: G01L1/18 ,  B81C1/00 ,  B81B7/02 ,  G01N3/02 ,  B81B3/00

CPC classification number: B81C1/00182 ,  G01L9/0044 ,  G01L9/0048 ,  G01L9/0052 ,  G01N3/02 ,  Y10T29/49117

Abstract: Embodiments provide a MEMS including a MEMS device and an detector circuit. The MEMS device includes a membrane, wherein a material of the membrane comprises a band gap and a crystal structure with structural elements (unit cells) connected by covalent bonds in two dimensions only. The detector circuit is configured to determine a deformation of the membrane based on a piezoresistive resistance of the material of the membrane.

Abstract translation: 实施例提供了包括MEMS器件和检测器电路的MEMS。 MEMS器件包括膜，其中膜的材料包括带隙和仅通过共价键连接的结构元件（单元电池）的晶体结构。 检测器电路被配置为基于膜的材料的压阻电阻来确定膜的变形。