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公开(公告)号：US11137376B2
公开(公告)日：2021-10-05
申请号：US16408712
申请日：2019-05-10
Applicant: Infineon Technologies AG
Inventor： Matthias Eberl , Thomas Albrecht
Abstract: A photoacoustic gas sensor includes a hermetically sealed housing filled with a reference gas. The photoacoustic gas sensor furthermore includes a microphone arranged in the housing and configured to generate a microphone signal as a function of a sound wave based on light incident in the housing. Furthermore, the photoacoustic gas sensor includes a controllable heat source arranged in the housing and configured to selectively thermoacoustically excite the reference gas in order to generate a thermoacoustic sound wave phase-shifted with respect to the sound wave.
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