公开(公告)号：US11309837B2

公开(公告)日：2022-04-19

申请号：US17035896

申请日：2020-09-29

Applicant: Innovative Micro Technology

Inventor： Christopher S. Gudeman ,  Abbas Abbaspour Tamijani

IPC: H03B9/14 ,  H01L47/02 ,  H03B7/14 ,  G01H13/00 ,  H03B5/18 ,  H03B7/06 ,  G01N22/00 ,  H03B9/12

Abstract: Systems and methods for forming a mm wave resonant filter include a lithographically fabricated high Q resonant structure. The resonant structure may include a plurality of cavities, each cavity having a characteristic frequency that defines its passband. A filter may include a plurality of resonant structures, and each resonant structure may include a plurality of cavities. These cavities and filters may be fabricated lithographically.

公开(公告)号：US20210083625A1

公开(公告)日：2021-03-18

申请号：US17035896

申请日：2020-09-29

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Abbas Abbaspour Tamijani

IPC: H03B9/14 ,  H01L47/02 ,  H03B7/14 ,  G01H13/00 ,  H03B5/18 ,  H03B7/06 ,  G01N22/00

Abstract: Systems and methods for forming a mm wave resonant filter include a lithographically fabricated high Q resonant structure. The resonant structure may include a plurality of cavities, each cavity having a characteristic frequency that defines its passband. A filter may include a plurality of resonant structures, and each resonant structure may include a plurality of cavities. These cavities and filters may be fabricated lithographically.