公开(公告)号：US10804850B2

公开(公告)日：2020-10-13

申请号：US16104146

申请日：2018-08-17

Applicant: Innovative Micro Technology

Inventor： Christopher S. Gudeman ,  Abbaspour Tamijani

IPC: H03B9/14 ,  H01L47/02 ,  H03B7/14 ,  G01H13/00 ,  H03B5/18 ,  H03B7/06 ,  G01N22/00 ,  H03B9/12

Abstract: Systems and methods for forming a compact gas sensor include using a lithographically fabricated high Q resonator coupled to at least one of a Gunn diode and an IMPATT diode. The resonator may include a plurality of cavities filled with a sample gas. A detector coupled to the resonator may measure the amplitude of the emitted mm wave radiation.

公开(公告)号：US20190068120A1

公开(公告)日：2019-02-28

申请号：US16104146

申请日：2018-08-17

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Abbaspour Tamijani

IPC: H03B9/14 ,  H01L47/02 ,  H03B7/14 ,  G01H13/00 ,  H03B7/06 ,  H03B5/18

Abstract: Systems and methods for forming a compact gas sensor include using a lithographically fabricated high Q resonator coupled to at least one of a Gunn diode and an IMPATT diode. The resonator may include a plurality of cavities filled with a sample gas. A detector coupled to the resonator may measure the amplitude of the emitted mm wave radiation.