公开(公告)号：US20170267504A1

公开(公告)日：2017-09-21

申请号：US15449415

申请日：2017-03-03

申请人： Integrated Dynamics Engineering GmbH

发明人： Andreas BIRKNER ,  Simon SCHADT ,  Arndt EVERS

IPC分类号： B66F7/00 ,  B66F9/10 ,  B66F9/12

CPC分类号： B66F7/00 ,  B66F9/10 ,  B66F9/12 ,  H01L21/67742

摘要： A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.

公开(公告)号：US20220186808A1

公开(公告)日：2022-06-16

申请号：US17440047

申请日：2020-03-18

申请人： Integrated Dynamics Engineering GmbH

发明人： Han HARTGERS ,  Arndt EVERS ,  Simon SCHADT

IPC分类号： F16F15/03 ,  F16M5/00 ,  H01J37/22 ,  H02K11/01

摘要： An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.