公开(公告)号：US20210352835A1

公开(公告)日：2021-11-11

申请号：US17306570

申请日：2021-05-03

申请人： Integrated Dynamics Engineering GmbH

发明人： Andreas BIRKNER

IPC分类号： H05K13/08 ,  H05K13/00 ,  G06N3/08

摘要： A method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine, wherein a computer-supported process is used to determine the presence and/or position and/or orientation of the substrate. Further, a system designed to execute the method. The computer-supported process includes an artificial neural network.

公开(公告)号：US20240357784A1

公开(公告)日：2024-10-24

申请号：US18762917

申请日：2024-07-03

申请人： Integrated Dynamics Engineering GmbH

发明人： Andreas BIRKNER

IPC分类号： H05K13/08 ,  G06N3/08 ,  H05K13/00

CPC分类号： H05K13/0818 ,  G06N3/08 ,  H05K13/0015 ,  H05K13/0812

摘要： A method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine, wherein a computer-supported process is used to determine the presence and/or position and/or orientation of the substrate. Further, a system designed to execute the method. The computer-supported process includes an artificial neural network.

公开(公告)号：US20180155126A1

公开(公告)日：2018-06-07

申请号：US15568348

申请日：2016-03-09

申请人： Integrated Dynamics Engineering GmbH

发明人： Ingo WEISKE ,  Arndt EVERS ,  Han HARTGERS ,  Andreas BIRKNER ,  Guido VAN LOON

IPC分类号： B65G1/02

CPC分类号： B65G1/026 ,  G03F7/70 ,  H01L21/67709 ,  H01L21/67733

摘要： The invention relates to a maintenance apparatus for a clean room or for systems in the clean room comprising a system component which can be moved horizontally and vertically. The system component is suspended on magnetic rails.

公开(公告)号：US20170267504A1

公开(公告)日：2017-09-21

申请号：US15449415

申请日：2017-03-03

申请人： Integrated Dynamics Engineering GmbH

发明人： Andreas BIRKNER ,  Simon SCHADT ,  Arndt EVERS

IPC分类号： B66F7/00 ,  B66F9/10 ,  B66F9/12

CPC分类号： B66F7/00 ,  B66F9/10 ,  B66F9/12 ,  H01L21/67742

摘要： A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.