公开(公告)号：US09939578B2

公开(公告)日：2018-04-10

申请号：US13891543

申请日：2013-05-10

Applicant: Intel Corporation

Inventor： Peter L. D. Chang ,  Jai-Hung Tseng

IPC: G02B6/12 ,  G02B6/138 ,  G02B6/42

CPC classification number: G02B6/12 ,  G02B6/138 ,  G02B6/4204 ,  G02B6/4212 ,  G02B2006/12171 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014

Abstract: Planar lightwave circuits with a polymer coupling waveguide optically coupling a planar waveguide over a first region of a substrate to an optical component, such as a laser, affixed to a second region of the substrate. The coupling waveguide may be formed from a polymer layer applied over the planar waveguide and optical component such that any misalignment between the two may be accommodated by patterning the polymer into a waveguide having a first end aligned to an end of the planar waveguide and a second end aligned to an edge of the optical component. In embodiments, the polymer is photo-definable, such as a negative resist, and may be patterned through direct laser writing. In embodiments, the optical component is a thin film affixed to the substrate through micro-transfer printing. In other embodiments, the optical component is a semiconductor chip affixed to the substrate by flip-chip bonding.