公开(公告)号：US20240053281A1

公开(公告)日：2024-02-15

申请号：US17883678

申请日：2022-08-09

Applicant: Intel Corporation

Inventor： John Ferdinand MAGANA ,  Guojing ZHANG

IPC: G01N21/958

CPC classification number: G01N21/958 ,  G01N2201/0636

Abstract: The present disclosure is directed to a reticle assembly having a reticle and a pellicle attached to a pellicle support frame positioned on the reticle and includes a sensor assembly having optical and sensor components, which monitor the pellicle. The optical components and the sensor components of the sensor assembly may be coupled to a controller, which may be further coupled to one or more semiconductor process tools.

公开(公告)号：US20230367204A1

公开(公告)日：2023-11-16

申请号：US17743499

申请日：2022-05-13

Applicant: Intel Corporation

Inventor： Lance C. HIBBELER ,  John Ferdinand MAGANA ,  Chytra PAWASHE

IPC: G03F1/64 ,  G01L1/14 ,  G01P13/00 ,  G01L1/16 ,  G01P15/00

CPC classification number: G03F1/64 ,  G01L1/142 ,  G01P13/00 ,  G01L1/16 ,  G01P15/00

Abstract: The present disclosure is directed to a reinforcement system including: a framed pellicle including: a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame; and an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the framed pellicle and the pellicle frame.